圆环孔阵列超材料对热释电太赫兹探测器性能影响关系研究  

Study on influence of ring hole array metamaterial on performance of pyroelectric terahertz detectors

作　　者：王杨涛 景蔚萱[1] 韩枫 孟庆之 林启敬[1] 赵立波[1] 蒋庄德[1] Wang Yang-Tao;Jing Wei-Xuan;Han Feng;Meng Qing-Zhi;Lin Qi-Jing;Zhao Li-Bo;Jiang Zhuang-De(State Key Laboratory for Manufacturing Systems Engineering,Xi’an Jiaotong University,Xi’an 710049,China)

机构地区：[1]西安交通大学机械制造系统工程国家重点实验室,西安710049

出　　处：《物理学报》2023年第4期321-330,共10页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:51975466)资助的课题。

摘　　要：本文提出了新的基于圆环孔阵列超材料的钽酸锂热释电太赫兹探测器,以提高0.1—1 THz频段太赫兹波探测性能.仿真分析了内外径、周期、厚度等特征参数对圆环孔阵列超材料太赫兹波透射带宽及透射率的定量影响关系,阐明了圆环孔阵列超材料与热释电探测器的不同结合方式对探测器的带宽及噪声等效功率的作用机理;制备了两种圆环孔阵列超材料钽酸锂热释电太赫兹探测器;测试了圆环孔阵列超材料的透射特性和两类热释电探测器的噪声等效功率.结果表明,所制备的圆环孔阵列超材料在0.25—0.65 THz频段透射率大于40%,实现了带通滤波.当圆孔阵列超材料与热释电探测器保持足够间距时,在0.315 THz点频其噪声等效功率为11.29μW/Hz0.5,是带通波段外0.1 THz噪声等效功率的6.3%,实现了带通探测;当圆环孔阵列超材料与热释电探测器贴合时,在0.315 THz点频其噪声等效功率为4.64μW/Hz0.5,是无圆环孔阵列超材料探测器噪声等效功率的29.4%,实现了窄带探测.上述结论可用于生物成像、大分子探测等领域中特定太赫兹波段的带通与窄带探测.In order to improve the detection performance of 0.1-1THz terahertz wave,a new lithium tantalate pyroelectric terahertz detector based on ring hole array metamaterial is proposed.The quantitative influences of the characteristic parameters such as inner diameter,outer diameter,period and thickness on the transmission bandwidth and transmittance of ring hole array metamaterials are analyzed by simulation.The mechanisms of the influences of different combinations of ring hole array metamaterials and pyroelectric detectors on the detection bandwidth and detection rate of terahertz waves are clarified.The lithium tantalate pyroelectric terahertz detectors of the ring hole array metamaterial ware are fabricated by the MEMS technology.The transmission of the ring hole array metamaterial and the noise equivalent power of the metamaterial detector at different frequencies are tested.The results show that the transmittance of the fabricated ring hole array metamaterial is greater than 40% at 0.25-0.65 THz,and bandpass filtering is realized.When the ring hole array metamaterial and the pyroelectric detector maintain a sufficient distance,the noise equivalent power of the detector at 0.315 THz is 11.29 μW/Hz0.5,which is 6.3% of the 0.1 THz noise equivalent power(outside the bandpass band),so the bandpass detection is achieved.When the ring hole array metamaterial is attached to the detector,the noise equivalent power of the metamaterial detector at 0.315 THz is 4.64μW/Hz0.5,which is29.4% that of the detector without the ring hole array metamaterial,so the narrowband detection is achieved.The above conclusions show that the pyroelectric terahertz detector based on the ring hole array metamaterial can realize the bandpass and narrowband detection of specific frequency band in applications such as biological imaging and macromolecular detection.

关 键 词：太赫兹 热释电探测器 圆环孔阵列超材料 探测带宽 

分 类 号：O441.4[理学—电磁学]