类H型腔耦合MIM波导的Fano共振及传感特性  

Fano Resonance and Sensing Characteristics of MIM Waveguide with H-Type Cavity

作　　者：王鸣宇 栾润青 苏杨 张胜言 田赫[1] 王金芳 李纪娜 刘星 刘雅洁 Wang Mingyu;Luan Runqing;Su Yang;Zhang Shengyan;Tian He;Wang Jinfang;Li Jina;Liu Xing;Liu Yajie(College of Science,Northeast Forestry University,Harbin 150040,Heilongjiang,China;Shanghai Xin Yue Lian Hui Electronic Technology Co.,Ltd.,Shanghai 200233,China)

机构地区：[1]东北林业大学理学院,黑龙江哈尔滨150040 [2]上海新跃联汇电子科技有限公司,上海200233

出　　处：《激光与光电子学进展》2022年第21期195-201,共7页Laser & Optoelectronics Progress

基　　金：黑龙江省大学生创新创业训练计划项目(202110225234)。

摘　　要：提出了一种由对称的类H型谐振腔和独立枝节组成的表面等离子体金属‐绝缘体‐金属(MIM)波导结构。利用有限元分析法研究了该结构的Fano共振及其光学传感特性。结果表明,该结构可实现Fano共振,最大折射率灵敏度和品质因数分别为1078.33 nm/RIU和1259.2。同时,研究了结构几何参数对Fano共振的影响,并进一步实现了Fano共振线型和波长的独立调节。所提出的等离子体MIM波导结构在集成光子器件和纳米光学传感领域具有潜在的应用前景。We propose a surface plasmon metalinsulatormetal(MIM)waveguide structure comprising a Htype resonator and an independent branch.The Fano resonance and optical sensing characteristics of the structure are examined by using finite element analysis.The findings reveal that the structure can achieve Fano resonance,and the maximum refractive index sensitivity and quality factor are 1078.33 nm/RIU and 1259.2,respectively.The effects of structural geometric factors on Fano resonance are examined,and independent changes of the Fano resonance line and wavelength are obtained.The suggested plasmonic MIM waveguide structure in this work has potential applications in integrated photonic devices and nanooptical sensors.

关 键 词：表面光学 表面等离子体激元 Fano共振 光学传感 有限元分析法 

分 类 号：TN252[电子电信—物理电子学]