无增敏材料修饰的高灵敏度光纤湿度传感器  

High-sensitivity Fiber-optic Humidity Sensor without Sensitizing Material Modification

作　　者：李咪 马成举[1] 李东明[1] 张跃斌 鲍士仟 金嘉升 张垚 刘芊震 刘洺 张贻歆 LI Mi;MA Chengju;LI Dongming;ZHANG Yuebin;BAO Shiqian;JIN Jiasheng;ZHANG Yao;LIU Qianzhen;LIU Ming;ZHANG Yixin(School of Science,Xi'an Shiyou University,Xi'an 710065,China)

机构地区：[1]西安石油大学理学院,西安710065

出　　处：《光子学报》2023年第2期92-100,共9页Acta Photonica Sinica

基　　金：陕西省重点研发计划(No.2018GY‒062);西安石油大学创新与实践能力培养项目(No.YCS20213213)。

摘　　要：设计并制作了一种高灵敏度且制作简单的聚甲基丙烯酸甲酯(Polymethyl Methacrylate,PMMA)微球与单模光纤复合的湿度传感器。该光纤湿度传感器由PMMA微球与单模光纤构成。由于在微球中形成了法布里-珀罗腔,当外界环境湿度升高时,PMMA微球吸收水分子体积膨胀,导致法布里-珀罗腔的腔长增长,使得传感器干涉光谱的波峰(谷)发生红移,从而实现湿度传感。对所制作传感器的湿度响应、稳定性和重复性等进行了实验研究,实验结果表明:在30%~80%湿度范围内,该湿度传感器的灵敏度达173.36 pm/%RH,波长漂移随相对湿度变化呈良好的线性关系,其线性度达0.99226,且具有良好的稳定性和重复性。该PMMA微球与单模光纤复合的湿度传感器具有灵敏度高、结构简单、无需镀膜且易于制作的优点。Relative Humidity(RH)is a physical parameter which reflects the degree of atmospheric dryness.It has wide applications in agriculture,biology,petrochemical fields,food-processing,medical treatment and Internet of Things(IOT)technology.Fiber-optic humidity sensors have attracted widespread attention from scholars due to their high-measurement accuracy,anti-electromagnetic interference,multiplexing,and distributed sensing.Especially,humidity sensors based on Fabry-Pérot Interferometers(FPIs)have been widely valued for their high repeatability,compact size and highsensitivity.Various humidity sensors based on silica fiber-optic have been reported.In the majority of fiberoptic humidity sensors,however,the sensitivity of RH detection can be improved by coating hygroscopic materials.At the same time,because they are fragile and inflexible,silica optical fibers must be treated carefully.This increases the cost and complexity of the fabrication process.Therefore,it has great research significance and application value to study new materials and structures.In order to simplify the manufacture of sensor and obtain excellent humidity sensitivity,a composite humidity sensor based on Polymethyl Methacrylate(PMMA)-microsphere and Single-mode Fiber(SMF)is designed and fabricated.Since the Polymer Optical Fiber(POF)material is very easily heated to form a molten state.In this work,the proposed sensor can be fabricated with an electric soldering iron.When the soldering iron is heated to about 70℃,place it 1 cm below the POF to slightly attach the POF to the SMF.Slowly rotate the heating source(i.e.,electric iron)to allow the POF to be evenly heated.A Fabry-Pérot(F-P)cavity is formed between PMMA-microsphere and the fiber endface.It should be noted that adjusting the heat source temperature and distance between fiber-optic and heat source,the temperature of heating can be controlled in the heating process.Compared with the alcohol lamp heating method,the electric soldering iron heating method can provide a stable heating sourc

关 键 词：光纤传感器 聚甲基丙烯酸甲酯 单模光纤 法布里-珀罗腔 相对湿度 

分 类 号：TN253[电子电信—物理电子学]