Transition-edge sensors using Mo/Au/Au tri-layer films  

作　　者：王沪兵 吕越 李冬雪 赵越 高波 王镇 Hubing Wang;Yue Lv;Dongxue Li;Yue Zhao;Bo Gao;Zhen Wang(State Key Laboratory of Functional Materials for Informatics,Shanghai Institute of Mierosystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China;CAS Center for Excellence in Superconducting Electronics(CENSE),Shanghai 200050,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]State Key Laboratory of Functional Materials for Informatics,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China [2]CAS Center for Excellence in Superconducting Electronics(CENSE),Shanghai 200050,China [3]University of Chinese Academy of Sciences,Beijing 100049,China

出　　处：《Chinese Physics B》2023年第2期509-513,共5页中国物理B（英文版）

基　　金：supported by the National Key Research and Development Program of China (Grant No. 2017YFA0304000);the Shanghai Municipal Science and Technology Major Project (Grant No. 2017SHZDZX02);China National Space Administration (CNSA) (Grant No. D050104);the grant for low energy gamma-ray detection research based on SQUID technique;supported by the Superconducting Electronics Facility (SELF) of Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences。

摘　　要：The proximity effect to reduce the transition temperature of a superconducting film is frequently used in transitionedge sensors. Here, we develop these transition-edge sensors using Mo/Au/Au tri-layer films to detect soft x-rays. They are equipped with an overhanging photon absorber. We reduce the fabrication complexity by integrating the sensor patterning with the tri-layer film formation. We determine the electro-thermal parameters of the sensors through a series of resistance vs. temperature and current vs. voltage measurements. We also demonstrate their energy-resolving capability by using a55Fe radioactive x-ray source. The best energy resolution was approximately 6.66 eV at 5.9 keV, with a theoretical count rate of 500 Hz.

关 键 词：transition-edge sensors proximity effect ELECTROPLATING 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]