考虑工件释放时间和柔性维护的单机调度问题  

Single-machine scheduling problem considering jobs’release times and flexible maintenances

作　　者：李小林[1] 司佳佳 尹传传 李玉鹏[1] LI Xiaolin;SI Jiajia;YIN Chuanchuan;LI Yupeng(School of Mines,China University of Mining and Technology,Xuzhou 221116,China)

机构地区：[1]中国矿业大学矿业工程学院,江苏徐州221116

出　　处：《计算机集成制造系统》2023年第2期581-592,共12页Computer Integrated Manufacturing Systems

基　　金：国家自然科学基金资助项目(71401164);中国博士后科学基金资助项目(2018M642367)。

摘　　要：针对晶圆制造过程中考虑清洗维护的生产调度联合优化问题,以最小化最大完工时间为求解目标,优化工件加工顺序及维护活动执行时间。证明了该问题为NP难的,建立了问题的整数规划模型并进行线性化。结合机器役龄约束下的成批调度问题特征,证明了解的性质,并设计ERD-LPT-BFLD启发式算法对问题进行求解。构建了考虑工件释放时间及清洁活动约束的下界算法。通过不同规模算例仿真实验,将所提启发式算法与CPLEX及下界算法求解结果进行比较,验证了所提算法的有效性。Aiming at the joint optimization problem of production scheduling considering cleaning and maintenance in wafer manufacturing process,to minimizing the objective of maximum completion time,the processing sequence of workpiece and the execution time of maintenance activities were optimized.The problem was proved to be NP hard,and an integer programming model was established and linearized.Combined with the characteristics of batch scheduling problem under the constraint of machine service age,the solution properties were proved,and the heuristic algorithm named Earliest Release Date—Longest Processing Time—Best Fit Longest Dirt(ERD-LTT-BFLD)was designed to solve the problem.A lower bound algorithm considering the release time and cleaning activity constraints was constructed.To verify the effectiveness of the proposed algorithm for different scale instances,the performance of the proposed heuristic algorithm was compared with the results from CPLEX and the lower bound algorithm in simulation experiments.

关 键 词：单机调度 晶圆清洗 柔性维护 释放时间 启发式算法 

分 类 号：TP301[自动化与计算机技术—计算机系统结构]