非完全覆盖双层微梁谐振器热弹性阻尼建模  

Thermoelastic damping in microbeam resonators partially covered by coatings

作　　者：杨龙飞 李普[2] 叶一舟 YANG Long-fei;LI Pu;YE Yi-zhou(School of Intelligent Manufacturing,Nanjing University of Science and Technology,Nanjing 210094,China;School of Mechanical Engineering,Southeast University,Nanjing 211189,China;College of Optoelectronic Engineering,Chongqing University,Chongqing 400044,China)

机构地区：[1]南京理工大学智能制造学院,江苏南京210094 [2]东南大学机械工程学院,江苏南京211189 [3]重庆大学光电工程学院,重庆400044

出　　处：《振动工程学报》2023年第1期86-95,共10页Journal of Vibration Engineering

基　　金：国家自然科学基金资助项目(62104022);MEMS教育部重点实验室(2242020k30039);中国博士后科学基金资助项目(2021M691598)。

摘　　要：热弹性阻尼是决定微机械谐振器品质因子上限的关键参数之一。以往热弹性阻尼解析解只适用于完全覆盖多层微梁结构。由于制造工艺和实际功能需求,非完全覆盖双层梁为代表的复杂结构形式更普遍。基于傅里叶传热定律,推导出非完全覆盖双层微梁谐振器热弹性阻尼的解析解。同时利用数值方法和实验验证了该解析解的有效性。并分析了镀层厚度、长度和位置对热弹性阻尼的影响。Thermoelastic damping(TED)is one of the key coefficients that determines the upper limit of the quality factor of the micromechanical resonator.In the past,the TED model was only suitable for fully covered multi⁃layer microbeam structures.How⁃ever,due to the manufacturing process and actual functional requirements,complex structural forms represented by incompletely covered double⁃layer beams are more common.Based on Fourier's law of heat conduction,this paper derives an analytical model for the TED of the partially covered bilayer microbeam resonators with the heat conduction along the length and thickness direc⁃tions.Meanwhile,numerical methods and experimental data are used to verify the effectiveness of the model.The effects of the thickness,length and position of the coating on the TED is also analyzed.The results provide a new idea for reducing TED by opti⁃mizing the length and position of the coating.

关 键 词：微机电系统谐振器 热弹性阻尼 品质因子 热弹性理论 

分 类 号：O326[理学—一般力学与力学基础]