石墨烯/硅基异质集成光电子器件  

Integrated Optoelectronic Devices Based on the Hybrid Integration of Silicon and Graphene

作　　者：彭文怡 严思琦 唐明[1] PENG Wenyi;YAN Siqi;TANG Ming(School of Optical and Electronic Information,Huazhong University of Science and Technology,Wuhan 430074,CHN)

机构地区：[1]华中科技大学光学与电子信息学院,武汉430074

出　　处：《半导体光电》2022年第6期1020-1028,共9页Semiconductor Optoelectronics

摘　　要：石墨烯/硅基异质集成的光子器件研究在近年来取得了巨大进展,因石墨烯所具有的诸多独特的物理性质如超高载流子迁移率、超高非线性系数等,石墨烯/硅基异质集成器件展现出了诸如超大带宽、超低功耗等优异性能。文章介绍了近年来报道的典型石墨烯/硅基异质集成器件,包括石墨烯/硅基电光调制器、石墨烯/硅基热光调制器和石墨烯/硅基光电探测器,简要阐述了其原理与性能,并对其未来的应用与发展做出了展望。The research on graphene/silicon-based hetero-integrated photonic devices has made great progress in recent years.The graphene/silicon-based heterogeneous integrated devices have shown excellent performance such as ultra-large bandwidth and ultra-low power consumption thanks to the unique physical properties of graphene,such as ultra-high carrier mobility and ultra-high nonlinear coefficient.In this work,we reviewed the typical graphene/silicon-based heterogeneous integrated devices reported in recent years,including graphene/silicon-based electro-optical modulators,graphene/silicon-based thermo-optical modulators and graphene/silicon-based photodetectors,briefly described their principles and properties,and made a prospect for their future applications and development.

关 键 词：硅基异质集成光子器件 石墨烯 调制器 探测器 

分 类 号：TN256[电子电信—物理电子学]