高速铌酸锂电光调制器研究进展  

Research Progress of High-speed Lithium Niobate Electro-optic Modulator

作　　者：陆锦东 匡作鑫 陈伟 余华[1] LU Jindong;KUANG Zuoxin;CHEN Wei;YU Hua(College of Optoelectronic Engineering,Chongqing University Key Laboratory of Optoelectronic Technology&System,Ministry of Education,Chongqing University,Chongqing 400044,CHN)

机构地区：[1]重庆大学光电工程学院、重庆大学光电技术及系统教育部重点实验室,重庆400044

出　　处：《半导体光电》2022年第6期1029-1039,共11页Semiconductor Optoelectronics

基　　金：国家自然科学基金项目(61874105);重庆市技术创新与应用发展专项重点项目(cstc2021jscx-gksbX0045)。

摘　　要：薄膜铌酸锂调制器因其小尺寸、高带宽、低半波电压等优点,成为近年来业内关注的热点。文章梳理了铌酸锂电光调制器的波导结构、电极结构及偏置点控制技术三个方面的相关研究进展,分析了平面掩埋、脊型、光子晶体等三种不同结构波导的调制器性能,讨论了铌酸锂调制器集总和行波两种电极结构的特点及其设计考量因素,对比了电光调制器偏置点控制中功率法和导频法的优缺点及其相关研究成果。在此基础上,进一步分析了为实现更小体积与更高带宽铌酸锂调制器所需的关键技术以及未来的研究方向。Thin film LiNbO3modulator has become a hot spot in the industry in recent years because of its small size,high bandwidth,low half wave voltage and other advantages.In this paper,the research progress on waveguide structure,electrode structure and bias point control technology of LiNbO3modulator were reviewed.The performance of three different waveguide structures,including planar buried waveguide,ridge waveguide and photonic crystal waveguide,were analyzed.The characteristics and design considerations of the lumped and traveling wave electrode structures of LiNbO3modulator were discussed.The advantages and disadvantages of the power method and the pilot method in the bias point control of electro-optic modulator were compared,as well as the related research results.Based on this,the key technologies and future research directions for realizing the LiNbO3modulator with smaller volume and higher bandwidth were further analyzed.

关 键 词：铌酸锂 电光调制器 光子晶体波导 行波电极 偏置点控制 

分 类 号：O436[机械工程—光学工程]