基于聚酰亚胺/石墨复合衬底的快速响应MEMS柔性温度传感器  

Fast Response MEMS Flexible Temperature Sensor Based on Polyimide/Graphite Composite Substrate

作　　者：刘玉 时浩程 果春焕 王学文[3] 杨卓青 LIU Yu;SHI Haocheng;GUO Chunhuan;WANG Xuewen;YANG Zhuoqing(Shanghai Jiao Tong University,School of Electronic Information and Electrical Engineering,Shanghai 200240,CHN;Harbin Engineering University,School of Materials and Chemical Engineering,Harbin 150001,CHN;Northwestern Polytechnical University,Frontier Science Center for Flexible Electronics(Institute of Flexible Electronics),Xi'an 710072,CHN)

机构地区：[1]上海交通大学电子信息与电气工程学院,上海200240 [2]哈尔滨工程大学材料与化学工程学院,哈尔滨150001 [3]西北工业大学柔性电子前沿科学中心(柔性电子研究院),西安710072

出　　处：《半导体光电》2022年第6期1068-1074,共7页Semiconductor Optoelectronics

基　　金：国家重点研发计划项目(2020YFB2008503);国家自然科学基金项目(61974088)。

摘　　要：针对现有柔性温度传感器衬底导热慢的问题,为快速监测轴承等曲面的温度,向聚酰亚胺(PI)中掺入3wt%石墨(GR),制备高导热复合材料,得到的GR/PI复合薄膜导热率达到0.777 W·m^(-1)·K^(-1),且具有良好的绝缘性。基于微加工技术,在GR/PI复合薄膜上制备了铂薄膜柔性温度传感器,改善了其动态响应特性,响应时间达到71 ms,优于纯PI衬底上的铂薄膜温度传感器。除此之外,所制备的柔性温度传感器的线性度、灵敏度和测量重复性等电学性能均较好。将制备的柔性温度传感器用于金属轴表面的温度测量,与商用红外摄像仪对比,两者测量值差别较小(±2℃以内)。To solve the problem of the substrate’s slow thermal conduction for flexible temperature sensors to quickly monitor the temperature of bearings and other curved surfaces, high thermal conductivity composites were prepared by doping 3wt% graphite(GR) into polyimide(PI), which reached a thermal conductivity of 0.777 W·m^(-1)·K^(-1)and had good insulation properties. Based on the microfabrication technique, Pt film flexible temperature sensor was prepared on the GR/PI composite film, and its dynamic response characteristics are improved with the response time of 71 ms, which is better than that of the Pt film flexible temperature sensor on pure PI substrate. In addition, the electrical properties such as linearity, sensitivity and measurement repeatability are good. The prepared sensor was used for temperature measurement on metal shaft surfaces, and the difference between the measured values is small(within ±2 ℃) compared with a commercial infrared camera.

关 键 词：复合薄膜衬底 柔性温度传感器 导热性优化 快速响应 

分 类 号：TP212.11[自动化与计算机技术—检测技术与自动化装置]