可集成制造的平面型电磁直线作动器研究  

Study of Planar Electromagnetic Linear Actuators with Integrated Manufacturing

作　　者：武强 管伟昌 戴旭涵 王怀治 高宇帆 丁桂甫 WU Qiang;GUAN Weichang;DAI Xuhan;WANG Huaizhi;GAO Yufan;DING Guifu(National Key Laboratory of Micro/Nano Fabrication Technology,Shanghai Jiao Tong University,Shanghai Jiao Tong University,CHN;Center for Advanced Electronic Materials and Devices,Shanghai Jiao Tong University,CHN)

机构地区：[1]上海交通大学微米/纳米加工技术国家级重点实验室 [2]上海交通大学先进电子材料与器件平台

出　　处：《半导体光电》2022年第6期1092-1098,共7页Semiconductor Optoelectronics

基　　金：国家自然科学基金项目(51875337);国家基础科研计划项目(JCKY2019602B004)。

摘　　要：电磁作动器具有输出力大、行程长、无接触等优势,在通信、自动测试、电力电子等领域有着广泛的应用,但受限于体积大、制造工艺复杂,难以满足相关领域电子系统向微型化、集成化的发展需求。针对上述问题,应用平面型集成线圈及高深宽比微结构设计,制造了一种微型化电磁作动器的原型样机,初步测试结果表明,器件的输出力可达毫牛量级,输出位移大于50μm,响应时间小于10 ms,为进一步开展相关器件研究探明了可行的技术路径。The electromagnetic actuator has a wide application prospect in communication, automatic testing, and power electronics due to its high output force, long stroke, and no contact, but it is difficult to meet the development demand of miniaturization and integration of electronic systems in related fields due to its large size and complicated manufacturing process. To address the above problems, a prototype of miniaturized electromagnetic actuator was designed and manufactured by applying planar integrated coils and high aspect ratio microstructure. Preliminary test results show that the output force of the device can reach the mN level, the output displacement is greater than 50 μm, and the response time is less than 10 ms, which indicates a feasible technical path for further research on the device.

关 键 词：微电磁驱动器 微线圈 集成制造 

分 类 号：TM359.9[电气工程—电机]