基于光纤传声器的振膜声压灵敏度测试方法  

Test Method for Diaphragm Sound Pressure Sensitivity Based on the Fiber Optic Microphone

作　　者：王坤博[1] 周瑜[1] 刘超[1] 魏晓村 WANG Kunbo;ZHOU Yu;LIU Chao;WEI Xiaocun(The Third Research Institute of China Electronics Technology Group Corporation,Beijing 100015,China)

机构地区：[1]中国电子科技集团公司第三研究所,北京100015

出　　处：《电声技术》2022年第10期101-106,共6页Audio Engineering

摘　　要：提出一种振膜声压灵敏度测试方法,通过法布里-珀罗干涉式光纤传声器系统,可有效得到振膜声压灵敏度。在理论分析中,应用多光束干涉法进行建模,分析得到振膜声压灵敏度受传声器性能参数的影响关系。应用激光测振仪和提出的测试方法对镍膜的声压灵敏度进行测试,验证了所提测试方法的准确性。最后应用所提出的测试方法测试了小尺寸的微机电(Micro Electro Mechanical System,MEMS)振膜。基于光纤传声器的振膜声压灵敏度测试方法为振膜的选用和高性能传声器的研制奠定了基础。This paper proposes a kind of test method for diaphragm sound pressure sensitivity based on the Fabry Perot interferometric fiber optic microphone. In the theoretical analysis, the optical model is established with method of multi-beams interference, and the influence of the microphone parameters to the sensitivity of the diaphragm is achieved. The acoustic pressure sensitivity of nickel membrane is tested by laser vibrometer and the method of this paper, which verifies the accuracy of this method. In the last, the acoustic pressure sensitivity of Micro Electro Mechanical System(MEMS) membrane is tested by the method based on the fiber optic microphone. The Test method for diaphragm sound pressure sensitivity based on the fiber optic microphone lays a research foundation for the selection of diaphragm and the development of high performance microphone.

关 键 词：振膜 灵敏度 光纤传声器 

分 类 号：TN641[电子电信—电路与系统]