A 640×640 ISFET array for detecting cell metabolism  

作　　者：Ling Yang Yizheng Huang Zhigang Song Manqing Tan Yude Yu Zhao Li 

机构地区：[1]Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China [2]College of Materials Science and Opto-Electronic Technology,University of Chinese Academy of Sciences,Beijing 100049,China [3]Beijing Key Laboratory of Genome and Precision Medicine Technologies,Beijing 100101,China

出　　处：《Journal of Semiconductors》2023年第2期84-91,共8页半导体学报（英文版）

基　　金：supported by the National Key Research and Development Program of China(Grant No.2021YFC2401001).

摘　　要：Ion sensitive field effect transistor(ISFET)devices are highly accurate,convenient,fast and low-cost in the detection of ions and biological macromolecules,such as DNA molecules,antibodies,enzymatic substrates and cellular metabolites.For high-throughput cell metabolism detection,we successfully designed a very large-scale biomedical sensing application specific integrated circuit(ASIC)with a 640×640 ISFET array.The circuit design is highly integrated by compressing the size of a pixel to 7.4×7.4μm^(2)and arranging the layout of even and odd columns in an interdigital pattern to maximize the utilization of space.The chip can operate at a speed of 2.083M pixels/s and the dynamic process of the fluid flow on the surface of the array was monitored through ion imaging.The pH sensitivity is 33±4 mV/pH and the drift rate is 0.06 mV/min after 5 h,indicating the stability and robustness of the chip.Moreover,the chip was applied to monitor pH changes in CaSki cells metabolism,with pH shifting from 8.04 to 7.40 on average.This platform has the potential for continuous and parallel monitoring of cell metabolism in single-cell culture arrays.

关 键 词：ASIC ISFET array pH monitoring ion imaging cell metabolism 

分 类 号：R318[医药卫生—生物医学工程] TN386[医药卫生—基础医学]