利用标量衍射理论的斜率和曲率混合型波前传感器装调技术  

Alignment Technique of Slope and Curvature Hybrid Wavefront Sensor Based on Scalar Diffraction Theory

作　　者：秦鹏 刘克 钟慧 李艳秋 张孝天 何飞 Qin Peng;Liu Ke;Zhong Hui;Li Yanqiu;Zhang Xiaotian;He Fei(Key Laboratory of Photoelectronic Imaging Technology and System,Ministry of Education,School of Optics and Photonics,Beijing Institute of Technology,Beijing 100081,China)

机构地区：[1]北京理工大学光电学院光电成像技术与系统教育部重点实验室,北京100081

出　　处：《光学学报》2022年第23期208-217,共10页Acta Optica Sinica

基　　金：国家自然科学基金(61975013,62175014);国家科技重大专项(2017ZX02101006-001)。

摘　　要：四孔振幅调制波前传感器(FHAM-WS)在夏克-哈特曼传感器(SHS)的各个子孔径内引入振幅调制,实现了子孔径内波前斜率和曲率的测量。FHAM-WS的精密装调对于实现高精度的波前传感至关重要。利用标量衍射理论分析了FHAM-WS中的微透镜阵列装调误差在各个子孔径内引入的波前斜率和曲率测量误差。以该误差为输入,利用斜率和曲率混合波前重构技术,获得了微透镜阵列装调误差在整个波面测量结果中引入的像差。仿真分析了FHAM-WS中微透镜阵列的焦面偏移误差、倾斜误差在波面测量结果中引入的各类像差的灵敏度,建立了FHAM-WS的装调技术方案。利用FHAM-WS的零检验实验验证了所提方法的有效性,实验结果表明经过所提方法装调校准后,FHAM-WS的绝对测量精度能达到0.005λ(均方根,波长为λ=635 nm)。The four-hole amplitude-modulated wavefront sensor(FHAM-WS) introduces amplitude modulation in each sub-aperture of Shack-Hartmann sensor(SHS) to measure the slope and curvature of the wavefront in the sub-aperture.The precise alignment of FHAM-WS is essential to achieve high precision wavefront sensing. In this paper, the scalar diffraction theory is used to analyze the slope and curvature measurement errors of the wavefront introduced by the alignment error of the microlens array in FHAM-WS in each sub-aperture. Taking the error as input, the aberration introduced by the microlens array alignment error in the whole wave surface measurement is obtained by using the slope and curvature mixed wavefront reconstruction technique. The sensitivities of various aberrations introduced by the focal plane offset error and tilt error of the microlens array in FHAM-WS are simulated and analyzed, and the alignment technique scheme of FHAM-WS is established. The validity of this method is verified by the zero-test experiment of FHAM-WS. The experimental results show that the absolute measurement accuracy of FHAM-WS can reach 0. 005λ(root mean square, wavelength of λ=635 nm) after the calibration by this method.

关 键 词：传感器 标量衍射理论 装调技术 斜率和曲率 波前重构 

分 类 号：O436.1[机械工程—光学工程]