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作 者:刘展硕 张罡[1] 柳泉 杜晓明[1] LIU Zhanshuo;ZHANG Gang;LIU Quan;DU Xiaoming(School of Materials Science and Engineering,Shenyang Ligong University,Shenyang 110159,China)
机构地区:[1]沈阳理工大学材料科学与工程学院,辽宁沈阳110159
出 处:《热加工工艺》2022年第24期68-71,共4页Hot Working Technology
基 金:中国工程物理研究院中子物理学重点实验室开放基金资助项目(2014BB05);2020年辽宁省教育厅科学研究经费资助项目(LG202020)。
摘 要:Y的沿晶界阻氧和细晶等作用使CrAlYN膜层在刀具、模具及高温部件等工程领域具有广泛应用。利用磁控溅射技术在高速钢(W18Cr4V)基材上制备CrAlYN膜层,并进行700、800、900、1000℃高温氧化实验。采用XRD、SEM/EDS、纳米力学系统(G200)等对膜层形貌、物相结构、化学成分、纳米硬度、弹性模量和比磨损率等随温度演变的规律进行研究。结果表明,沉积态膜层与高速钢基材相比,具有显著提高的纳米硬度、模量和明显降低的比磨损率。从700~1000℃时,膜层的硬度和模量分别从21.5、298.3 GPa降低到6.47、172.0 GPa;比磨损率总体呈上升趋势,其中800℃的比磨损率比700℃时的高11.1倍,1000℃的比磨损率比900℃时的高1.25倍,比磨损率的提高是膜层表面氧化物增长及热稳定性能降低综合作用的结果。Y has the effect of oxygen barrier and fine crystal along the grain boundary, which make CrAlYN film layers widely used in the engineering field of tools, molds and high-temperature parts, etc. CrAlYN films were prepared on W18Cr4V substrates by magnetron sputtering. The high temperature oxidation experiments were conducted at 700 ℃, 800 ℃,900 ℃ and 1000 ℃. The morphology, phase structure, chemical composition, nanohardness, elastic modulus and specific wear rate of the film changing with the temperature were characterized by XRD, SEM/EDS and nano-mechanical system(G200). The results show that compared with the W18Cr4V,the hardness and modulus of the film layer are much higher and the specific wear rate is much lower. From 700 ℃ to 1000 ℃, the hardness and modulus of the film layer decreases from 21.5GPa and 298.3 GPa to 6.47 GPa and 172.0 GPa. On the whole, the trend of specific wear rate is rising, where the specific wear rate at 800 ℃ is 11.1 times higher than that at 700 ℃, and the specific wear rate at 1000 ℃ is 1.25 times higher than that of at 900 ℃. The increase of specific wear rate and the reduction of thermal stability attribute to the combined effect of the growth of oxidation on the surface of film layer.
关 键 词:磁控溅射 CrAlYN膜层 纳米磨损率 高温氧化性能
分 类 号:TG174.44[金属学及工艺—金属表面处理]
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