Design,fabrication,characterization and reliability study of CMOS-MEMS Lorentz-force magnetometers  

作　　者：J.J.Valle J.M.Sánchez-Chiva D.Fernández J.Madrenas 

机构地区：[1]Department of Electronic Engineering,Universitat Politècnica de Catalunya,Jordi Girona 1 i 3,Edifici C4,08034 Barcelona,Spain [2]Sorbonne Université,CNRS,Laboratoire de Recherche en Informatique(LIP6),UMR7606,4 place Jussieu,75005 Paris,France [3]Institut de Física d’Altes Energies(IFAE),The Barcelona Institute of Science and Technology(BIST),Edifici Cn.Facultat Ciències Nord,Universitat Autónoma de Barcelona,08193 Bellaterra,(Barcelona),Spain

出　　处：《Microsystems & Nanoengineering》2022年第5期17-41,共25页微系统与纳米工程（英文）

基　　金：supported by Baolab Microsystems and by the Spanish Ministry of Science,Innovation and Universities,the State Research Agency(AEI),and the European Social Fund(ESF)under project RTI2018-099766-B-I00.

摘　　要：This article presents several design techniques to fabricate micro-electro-mechanical systems(MEMS)using standard complementary metal-oxide semiconductor(CMOS)processes.They were applied to fabricate high yield CMOS-MEMS shielded Lorentz-force magnetometers(LFM).The multilayered metals and oxides of the back-end-of-line(BEOL),normally used for electronic routing,comprise the structural part of the MEMS.The most important fabrication challenges,modeling approaches and design solutions are discussed.Equations that predict the Q factor,sensitivity,Brownian noise and resonant frequency as a function of temperature,gas pressure and design parameters are presented and validated in characterization tests.A number of the fabricated magnetometers were packaged into Quad Flat No-leads(QFN)packages.We show this process can achieve yields above 95%when the proper design techniques are adopted.Despite CMOS not being a process for MEMS manufacturing,estimated performance(sensitivity and noise level)is similar or superior to current commercial magnetometers and others built with MEMS processes.Additionally,typical offsets present in Lorentz-force magnetometers were prevented with a shielding electrode,whose efficiency is quantified.Finally,several reliability test results are presented,which demonstrate the robustness against high temperatures,magnetic fields and acceleration shocks.

关 键 词：LORENTZ MAGNETOMETER CHARACTERIZATION 

分 类 号：TN96[电子电信—信号与信息处理]