High-performance millimeter-scale silicon grating emitters for beam steering applications  

作　　者：Ze Chen Haibin Lü Yanfeng Chen Xiaoping Liu 陈泽;吕海斌;陈延峰;刘晓平(National Laboratory of Solid State Microstructures and College of Engineering and Applied Sciences,Nanjing University,Nanjing 210093,China;Collaborative Innovation Center of Advanced Microstructures,Nanjing University,Nanjing 210093,China;School of Physical Science and Technology,ShanghaiTech University,Shanghai 201210,China)

机构地区：[1]National Laboratory of Solid State Microstructures and College of Engineering and Applied Sciences,Nanjing University,Nanjing 210093,China [2]Collaborative Innovation Center of Advanced Microstructures,Nanjing University,Nanjing 210093,China [3]School of Physical Science and Technology,ShanghaiTech University,Shanghai 201210,China

出　　处：《Chinese Optics Letters》2022年第12期25-31,共7页中国光学快报（英文版）

基　　金：supported by the Shanghai Municipal Science and Technology Major Project(No.2017SHZDZX03)。

摘　　要：A 2-mm-long silicon-on-insulator grating emitter with a narrow angular full width at half-maximum(FWHM)and a high sideband suppression ratio(SSR)is proposed and designed.It consists of a Si_(3)N_(4)/Si grating with an approximate Gaussian emission profile along the grating length,which aims to reduce the sidelobe intensity of the scanning light in the far-field,thereby improving the resolution of the longitudinal steering resolution of the light detection and ranging(lidar).Numerical analysis shows that the angular FWHM of the emitted beam could be as low as 0.026°for a grating length of 2.247 mm and the input TE-like waveguide mode at 1550 nm,and the SSR could be more than 32.622 dB.Moreover,this Si_(3)N_(4)/Si grating exhibits a favorable fabrication error tolerance when considering the width and length variation of the Si_(3)N_(4)overlayer in practice.Our design offers a promising platform for realizing integrated optical phased arrays for the long-distance solid-state lidar.

关 键 词：grating emitter coupled-mode theory genetic algorithm 

分 类 号：U463.6[机械工程—车辆工程] V279[交通运输工程—载运工具运用工程] TN958.98[交通运输工程—道路与铁道工程]