基于谐振环法板材介电常数高精度测试研究  

Research on high-precision measurement of substrate dielectric constant based on resonant ring method

作　　者：刘傲 陈佳慧 任英杰 杜宏宇[1] 万发雨[1] 周蓓 Liu Ao;Chen Jiahui;Ren Yingjie;Du Hongyu;Wan Fayu;Zhou Bei(Nanjing University of Information Science&Technology,Nanjing 210044,China;Zhejiang Huazheng New Material Group Co.,Ltd,Hangzhou 311100,China)

机构地区：[1]南京信息工程大学,南京210044 [2]浙江华正新材料股份有限公司,杭州311100

出　　处：《电子测量与仪器学报》2022年第11期42-49,共8页Journal of Electronic Measurement and Instrumentation

基　　金：国家重点研发计划(2022YFE0122700)项目资助。

摘　　要：介电常数是影响高频板材性能的重要参数,板材介电常数的准确性及空间分布均匀性都会对微波电路的性能产生重要影响。本文首先设计了增强型耦合环、屏蔽通孔和共面波导技术的谐振环电路,增强环对外界的抗干扰能力并使S21分布在-30~-20 dB,提高传输效率。其次分析了不同的环平均半径、环宽、耦合间隙对仿真结果的影响。接着对谐振环电路加工、测试,实测结果表明在2、10、24 GHz频点下介电常数误差小于±0.007,证明该方法测试精度高。最后基于该谐振环电路对某国产板材介电常数分布测试分析,结果表明加工和板材空间分布造成的介电常数误差小于±0.024,证明板材性能良好。The dielectric constant is an important parameter that affects the performance of high-frequency substrate,and the accuracy and spatial distribution of the dielectric constant of the substrate will have an important impact on the performance of microwave circuits.In this paper,the resonant ring circuit of enhanced coupling ring,shielded through hole and coplanar waveguide technology is designed first,to enhance the anti-interference ability of the ring to the outside world,and to distribute S21between-30 to 20 dB,and improve the transmission efficiency.Secondly,the influence of different ring average radius,ring width and coupling gap on the simulation results is analyzed.Then,the resonant ring circuit is processed and tested.The measured results show that the dielectric constant error is less than±0.007 at the frequency points of 2,10 and 24 GHz,which proves that the method has high test accuracy.Finally,based on the test and analysis of the dielectric constant distribution of a domestic substrate based on the resonant ring circuit,the results show that the dielectric constant error caused by processing and the spatial distribution of the substrate is less than±0.024,which proves that the substrate has good performance.

关 键 词：介电常数 高频板材 测试精度 谐振环 

分 类 号：TM934.33[电气工程—电力电子与电力传动]