The push-pull principle:an electrostatic actuator concept for low distortion acoustic transducers  

作　　者：Bert Kaiser Hermann A.G.Schenk Lutz Ehrig Franziska Wall Jorge M.Monsalve Sergiu Langa Michael Stolz Anton Melnikov Holger Conrad David Schuffenhauer Harald Schenk 

机构地区：[1]Fraunhofer Institute for Photonic Microsystems IPMS,Dresden,Germany [2]Arioso Systems GmbH,since Sep.1st 2022:BOSCH Sensortec GmbH,Dresden,Germany [3]Chair of Micro and Nano Systems,Brandenburg University of Technology Cottbus-Senftenberg,Cottbus,Germany

出　　处：《Microsystems & Nanoengineering》2022年第6期181-194,共14页微系统与纳米工程（英文）

基　　金：supported by Fraunhofer Zukunftsstiftung and by the State of Brandenburg and the European Union under contract PROFIT/EFRE No.80256335.

摘　　要：Electrostatic actuators are of particular interest for microsystems(MEMS),and in particular for MEMS audio transducers for use in advanced true wireless applications.They are attractive because of their typically low electrical capacitance and because they can be fabricated from materials that are compatible with standard complementary metal-oxide semiconductor(CMOS)technology.For high audio performance and in particular low harmonic distortion(THD)the implementation of the push-pull principle provides strong benefits.With an arrangement of three electrodes in a conjunct moving configuration on a beam,we demonstrate here for the first time a balanced bending actuator incarnating the push-pull principle operating at low voltages.Our first design already exhibits a harmonic distortion as low as 1.2%at 79 dB using a signal voltage of only 6 V_(p) and a constant voltage of only±10 V_(dc) in a standard acoustic measurement setup.Thus,exceeding our previously reported approach in all three key performance indications at the same time.We expect that our novel electrode configurations will stimulate innovative electrostatic actuator developments for a broad range of applications.In this paper we report the basic theory,the fabrication and the performance of our novel actuator design acting as an audio transducer.

关 键 词：DISTORTION PUSH ELECTROSTATIC 

分 类 号：O42[理学—声学]