金属网格柔性透明导电薄膜研究进展  

Research Progress of Flexible Transparent Conductive Film Based on Metal Mesh

作　　者：黄兵 刘萍 HUANG Bing;LIU Ping(School of Physics,University of Electronic Science and Technology of China,Chengdu 610054,China;College of Electron and Information Engineering,University of Electronic Science and Technology of China Zhongshan Institute,Zhongshan 528402,Guangdong,China)

机构地区：[1]电子科技大学物理学院,成都610054 [2]电子科技大学中山学院电子信息学院,广东中山528402

出　　处：《材料导报》2023年第5期140-151,共12页Materials Reports

基　　金：广东省教育厅重点科研项目(2021ZDZX1052,2020KCXTD030);中山市科技计划项目(2022B2020)。

摘　　要：随着柔性电子器件的发展,柔性显示器、柔性太阳能电池、柔性传感器等产品已经逐步从实验室走向市场。柔性透明导电薄膜作为柔性光电器件不可或缺的重要组成部分,今后其需求量只会不断增加。目前的光电子器件逐渐向大尺寸、轻薄、柔性、可拉伸、低成本等方面发展。氧化铟锡(Indium tin oxide,ITO)是目前使用最广泛的透明导电薄膜,但ITO制备工艺复杂,具有脆性,且铟是稀有金属,储量少,价格昂贵。因此,研制可替代ITO的高性能柔性透明导电薄膜越来越迫切。目前已有研究人员研制出多种可替代ITO的柔性透明导电薄膜,其中基于金属网格的柔性透明导电薄膜是替代ITO的有力竞争者。金属网格柔性透明导电薄膜展示了极好的光电性能和机械灵活性。它最吸引人的地方在于可以独立改变金属网格的线宽和间距,从而在调节薄膜方阻和透光率方面表现出更好的权衡性。目前,已有大量的研究人员研制出可与ITO媲美的金属网格柔性透明导电薄膜。多数研究者通过光刻技术制作出母版,再结合化学镀或电沉积技术进行导电薄膜制作。以光刻技术为基础制备的柔性透明导电薄膜性能良好,但光刻工艺复杂而且设备昂贵。还有研究人员通过其他技术进行研究,如印刷增材制造技术、静电纺丝技术、光子烧结、模板法等,制备的柔性透明导电薄膜性能良好。其中基于印刷增材制造技术制备的柔性透明导电薄膜已经在触摸屏领域实现产业化,有望进一步发展。本文综述了金属网格柔性透明导电薄膜的研究进展及在光电器件中的应用,包括有机太阳能电池、有机发光二极管等,具体讨论了金属网格透明导电薄膜的基本特性、光电性能、制造技术和器件应用,并点明了其制备方法的优劣性,以期为后续的研究提供参考。Developments in flexible electronic devices have led to development of flexible displays, solar cells and sensors. Particularly, flexible transparent conductive films(TCFs) form an indispensable part of flexible electronic devices and the demand for these conductive films will increase in the future. At present, scalable, lightweight, flexible, stretchable, and low-cost optoelectronic devices are desired. Indium tin oxide(ITO) is the most widely used TCFs. However, ITO is brittle in addition to requiring complication preparation process. More importantly, indium is a rare metal, which is scarce and expensive. Therefore, substitutes exhibiting high performance for use in flexible TCFs should be developed. Researchers have developed a variety of flexible TCFs that can replace ITO, and films based on metal mesh have demonstrated great potential. These films have demonstrated excellent photoelectric properties and mechanical flexibility. The line width and spacing of the metal mesh can be changed independently, thus granting a better ability to adjust trade-off between square resistance and transmittance of the film. Many reports have detailed the development of metal mesh-based flexible TCFs with performances, which are comparable to ITO. Most of these reports prepare master plates by photolithography. Consequently, this preparation is combined with electroless plating or electrodeposition to make conductive films. Flexible TCFs prepared by photolithography have good performance. However, photolithography is complicated and expensive. Some reports have detailed the preparation of flexible TCFs using additive manufacturing, electrostatic spinning, photonic sintering, and template method. The flexible TCFs fabricated using additive manufacturing have been commercialized for touchscreen applications and are expected to be developed further. In this paper, progress in preparation and optoelectronic device applications of metal mesh TCFs is reviewed. Specifically, the photoelectric properties, manufacturing technology, a

关 键 词：金属网格 柔性透明导电薄膜 太阳能电池 有机发光二极管 

分 类 号：TB31[一般工业技术—材料科学与工程]