不同对偶材料对四面体非晶碳薄膜摩擦学性能的影响  

Effects of Different Counterpart Materials on the Tribological Behaviors of Ta-C Film

作　　者：潘发青 张浩洋 丁继成 赵志勇 张宝荣 杨英 彭欣 郑军[1,2] PAN Fa-qing;ZHANG Hao-yang;DING Ji-cheng;ZHAO Zhi-yong;ZHANG Bao-rong;YANG Ying;PENG Xin;ZHENG Jun(Key Laboratory of Green Fabrication and Surface Technology of Advanced Metal Materials,Ministry of Education,Ma’anshan 243002,China;School of Materials Science and Engineering,Anhui University of Technology,Ma’anshan 243002,China;Shanxi Diesel Engine Industry Co.,Ltd.,Datong 037027,China;Chongqing Construction Industry Group Co.,Ltd.,Chongqing 400054,China)

机构地区：[1]先进金属材料绿色制备与表面技术教育部重点实验室,安徽马鞍山243002 [2]安徽工业大学材料科学与工程学院,安徽马鞍山243002 [3]山西柴油机工业有限责任公司,山西大同037027 [4]重庆建设工业集团有限责任公司,重庆400054

出　　处：《材料保护》2023年第2期9-15,共7页Materials Protection

基　　金：安徽省重点研究与开发计划项目(国际合作)202004b11020011;安徽省重点研究与开发计划项目(标准化专项)202004h07020020;安徽省高等学校自然科学研究项目(编号:KJ2020A0264)资助。

摘　　要：为探究四面体非晶碳(ta-C)薄膜与几种典型对偶材料的摩擦学性能的变化规律及相关机理,采用新型激光引弧磁过滤真空阴极电弧技术制备厚度约为1μm的ta-C薄膜,选用WC、Al_(2)O_(3)、9Cr183种高硬度对磨球进行摩擦磨损试验。使用扫描电镜、X射线光电子能谱、拉曼光谱仪、表面轮廓仪、纳米压痕仪、球盘摩擦磨损试验仪对ta-C薄膜的微观结构和摩擦学性能进行系统研究。结果表明:3种对偶材料下,ta-C薄膜的摩擦系数都很低,均表现出较优异的抗磨减摩性能。其中,当对磨球为Al_(2)O_(3)时,薄膜摩擦系数最低,为0.11左右;当对磨球为9Cr18时,薄膜的磨损率最小,为4.0×10^(-7)mm^(3)/(N·m);对磨球为WC时,薄膜的磨损率最高,为7.6×10^(-7)mm^(3)/(N·m)。薄膜的磨损机理主要为磨粒磨损,不同对偶材料表面均生成了具有碳质结构特征和石墨化的转移膜。For studying the changing rules of the tribological properties and the related mechanisms of ta-C film in friction against several typical counterpart materials,a ta-C film with a thickness of approximately 1μm was deposited by the laser-induced arc magnetic filtered vacuum cathode arc technology,and three kinds of counterpart balls with high hardness(WC,Al_(2)O_(3)and 9Cr18)were used for friction and wear test.The microstructure and tribological properties of the ta-C film were systematically investigated by scanning electron microscopy,X-ray photoelectron spectroscopy,Raman spectrometer,surface profilometer,nano-indentation tester and ball-disk friction and wear equipment.Results showed that the ta-C film possessed extremely low friction coefficients in friction against all the three counterpart materials,and exhibited excellent antiwear and antifriction properties.When Al_(2)O_(3)counterpart was employed,the friction coefficient of the film was the lowest with a value of around 0.11;when 9Cr18 counterpart was employed,the film showed the lowest wear rate of 4.0×10^(-7)mm^(3)/(N·m);and when WC counterpart was employed,the film showed the highest wear rate of 7.6×10^(-7)mm^(3)/(N·m).Besides,the main wear mechanism of the film was abrasive wear,and a graphitized transfer film with the characteristics of carbon structure was detected on the surfaces of all the counterparts.

关 键 词：ta-C薄膜 激光引弧 转移膜 石墨化 摩擦磨损 

分 类 号：TG174.4[金属学及工艺—金属表面处理]