基于光学干涉法的光学元件表面粗糙度检测技术  

Surface roughness detection technology of optical components based on optical interferometry

作　　者：宋永 刘德春 SONG Yong;LIU Dechun(Institute of Applied Physics,Aba Teachers University,Wenchuan Sichuan 623002,China;College of Electronic Information and Automation,Aba Teachers University,Wenchuan Sichuan 623002,China)

机构地区：[1]阿坝师范学院应用物理研究所,四川汶川623002 [2]阿坝师范学院电子信息与自动化学院,四川汶川623002

出　　处：《激光杂志》2023年第2期226-230,共5页Laser Journal

基　　金：四川省科技厅项目(No.21RKX0483);阿坝州应用技术研究与开发资金资助项目(No.19YYJSYJ0087)。

摘　　要：为实现光学元件表面微小粗糙度的精准、详细检测,研究基于光学干涉法的光学元件表面粗糙度检测技术。该技术采用基于集成光学干涉成像技术对光学元件表面干涉成像,通过改进的Niblack二值化算法提取元件表面干涉图像条纹信息,并基于节点迭代的去毛刺方法细化处理干涉条纹,利用最小二乘方法拟合干涉条纹,获取最小二乘拟合直线得出评定基准,建立评定表面粗糙度的高度参数和间距参数的数学模型,完成粗糙度检测。测试结果显示:该技术干涉成像能力较强,生成的光学透镜元件干涉图像弧度与边缘较为清晰,可有效去除干涉条纹毛刺,检测光学元件表面粗糙度时的真正类率最大数值已达到1.0。In order to realize the accurate and detailed detection of surface roughness of optical components, the detection technology of surface roughness of optical elements based on optical interference method is studied. This technology adopts the integrated optical interference imaging technology to image the surface interference of optical elements, extracts the fringe information of the interference image on the surface of optical elements through the improved Niblack binarization algorithm, refines the interference fringe based on the deburring method of node iteration, uses the least square method to fit the interference fringe, obtains the least square fitting straight line to obtain the evaluation benchmark, establishes the mathematical model for evaluating the height parameters and spacing parameters of the surface roughness, and completes the roughness detection. The test results show that the interference imaging ability of this technology is strong, the radian and edge of the generated interference image of optical lens elements are clear,and the interference fringe burrs can be effectively removed, and the maximum value of the real class rate when detecting the surface roughness of optical elements has reached 1. 0.

关 键 词：光学干涉法 光学元件 表面粗糙度 检测技术 干涉成像 干涉条纹 拟合直线 评定基准 

分 类 号：TN201[电子电信—物理电子学]