高压驱动的三波腹多环盘式硅微陀螺仪  

High Voltage Driven Three-Antinode Multi-ring Disc Resonant Gyroscope

作　　者：夏敦柱[1] 姚默晗 杜森 XIA Dunzhu;YAO Mohan;DU Sen(School of Instrument Science and Engineering,Southeast University,Nanjing Jiangsu 210096,China)

机构地区：[1]东南大学仪器科学与工程学院,江苏南京210096

出　　处：《传感技术学报》2023年第1期1-8,共8页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(61871125)。

摘　　要：设计和研究了一种带有高压驱动电路的多环盘式硅微陀螺仪(DRG)。该陀螺仪具有MEMS嵌套环结构,工作在三波腹(n=3)的振动模态下,主振型和从振型之间具有更小的频率裂解。系统采用双闭环测控电路驱动,结构简单,具有良好的稳定性和较大的带宽。其中刚度调谐和正交误差校正所需要的高压直流电由小型化的Boost升压电路提供。样机测试结果表明闭环Boost升压电路精度高,对陀螺仪的零偏不稳定性影响小。陀螺仪具有高品质因数(Q=36503)、低非线性度(314×10^(-6))、低角度随机游走(0.1664°/√4)以及低零偏不稳定性(2.0229°/h)。A multi-ring disk resonant gyroscope(DRG)with a high-voltage driving circuit is designed and studied.The gyroscope has a MEMS nested ring structure and works in three antinodes(n=3)vibration modes,with smaller frequency splitting between the drive mode and the sense mode.The system is driven by the double closed-loop measurement and control circuit,with simple structure,good stability and large bandwidth.The high-voltage direct current for the stiffness tuning and the quadrature error correction is provided by a miniaturized boost chopper.The test result shows that the closed-loop boost chopper has high precision and little influence on the bias instability of the gyroscope.The gyroscope has a high quality factor(Q=36503),a low nonlinearity(314×10^(-6)),a low angle random walk(0.1664°/√4),and a low bias instability(2.0229°/h).

关 键 词：多环盘式陀螺仪 三波腹 双闭环电路 Boost升压电路 正交误差校正 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] V241[自动化与计算机技术—控制科学与工程]