微小球面显微光学系统设计与照明分析  

Design and illumination analysis of tiny-spherical microscopic optical system

作　　者：刘晓茵 杨磊[1] 杨童[1] 苏晓琴 谢洪波[1] LIU Xiaoyin;YANG Lei;YANG Tong;SU Xiaoqin;XIE Hongbo(Key Laboratory of Optoelectronics Information Technology(Ministry of Education),School of Precision Instruments and Optoelectronics Engineering,Tianjin University,Tianjin 300072,China)

机构地区：[1]天津大学精密仪器与光电子工程学院,光电信息技术教育部重点实验室,天津300072

出　　处：《应用光学》2023年第2期262-267,共6页Journal of Applied Optics

基　　金：国防预研基金。

摘　　要：机器视觉检测技术具有非接触、高精度的优点,正在逐渐取代人工检测,成为工业生产检测的重要一环,作为前端的光学系统是机器视觉检测技术的核心部分。文中针对半径10 mm以内的光滑球体表面检测设计了一款双远心光学成像系统。系统由7片镜片和1片滤光片组成,采用了2个非球面校正像差,调制传递函数曲线在40 lp·mm-1处大于0.3,具有良好的成像性能。由于该系统光圈较小且待测物为类镜面反射材料,设计完成后进行了照明模拟,选择采用多个面光源对待测物进行照明。模拟结果表明,文中设计的双远心光学系统实现了对较大曲率表面成像,并给出了一种配套的照明方式。With the advantages of non-contact and high accuracy, the machine vision detection technology is gradually replacing manual detection methods and becoming an important part of industrial production detection. As the front end, the optical system is a core part of the machine vision detection technology. A bitelecentric optical imaging system was designed for the detection of smooth spherical surfaces within a radius of 10 mm. The optimized system was composed of 7 lenses and 1 filter, and 2 aspherical surfaces were used to correct the aberration. The modulation transfer function(MTF) curve was greater than 0.3 at 40 lp·mm-1,which meaned that the system was of good imaging performance. Since the aperture was small and the object to be tested was a specular-like material, the lighting simulation was carried out, and multiple surface light sources were selected to illuminate the object. The simulation results show that the designed bi-telecentric optical system realizes the imaging of surfaces with large curvature, and a matching illumination method is proposed.

关 键 词：显微光学系统 双远心光学系统 机器视觉检测 光学设计 照明 

分 类 号：TN202[电子电信—物理电子学]