一种大功率宽波段激光束散角的校准测试方法  

Calibration method for high-power and wide-band laser beam divergence angle

作　　者：段园园[1] 吉晓[1] 阴万宏[1] 于东钰[1] 张金玉 张彪[1] 宋一兵[1] 黎高平[1] DUAN Yuanyuan;JI Xiao;YIN Wanhong;YU Dongyu;ZHANG Jinyu;ZHANG Biao;SONG Yibing;LI Gaoping(Xi'an Institute of Applied Optics,Xi'an 710065,China;College of Optical and Electronic Technology,China Jiliang University,Hangzhou 310018,China)

机构地区：[1]西安应用光学研究所,陕西西安710065 [2]中国计量大学光学与电子科技学院,浙江杭州310018

出　　处：《应用光学》2023年第2期450-455,共6页Journal of Applied Optics

基　　金：技术基础科研项目(2Q2020YQ208008)。

摘　　要：在大功率激光系统的评价与分析中,激光器的光束品质是系统光束品质的决定性因素,也是激光器验收、鉴定的重要指标,其中束散角是判别激光光束质量的重要参数。本系统测试激光波长的范围比较宽,一般在0.532μm~10.6μm之间,没有合适的探测器能够覆盖整个波段,所以采用了一种新的方法来解决宽波段束散角的测量问题。选用CCD成像和扫描狭缝相结合的方法来实现宽波段激光光束束散角的测量,可见光和近红外波段(0.532μm~1.2μm)激光光束采用CCD法测量激光束散角,中红外波段(1.2μm~10.6μm)激光光束采用扫描狭缝法测量激光束散角。两种方法的结合可以较为精确地测量出不同波段的激光束散角。In the evaluation and analysis of high-power laser system, the beam quality of laser is the decisive factor of the system beam quality and also an important index of acceptance and appraisal of laser, among which the beam divergence angle is an important parameter to identify the laser beam quality. The range of laser wavelength tested in this system is relatively wide, generally between 0.532 μm~10.6 μm, and no suitable detector can cover the whole band. Therefore, a new method was adopted to solve the measurement problem of wide-band beam divergence angle. The method of combining charge coupled device(CCD) imaging and scanning slit was used to measure the wide-band beam divergence angle. The CCD method was used to measure the laser beam divergence angle in visible and near-infrared band(0.532 μm~1.2 μm), and the scanning slit method was used to measure the laser beam divergence angle in mid-infrared band(1.2 μm~10.6 μm). The combination of the two methods can accurately measure the laser beam divergence angle in different wavebands.

关 键 词：大功率激光 光束品质 激光束散角 扫描狭缝 CCD成像 

分 类 号：TN206[电子电信—物理电子学]