基于HTCC的LVDT位移传感器敏感芯体设计  

Sensitive core design of LVDT displacement sensor based on HTCC

作　　者：徐冬 杨思远 咸婉婷 张宁 李程达 XU Dong;YANG Siyuan;XIAN Wanting;ZHANG Ning;LI Chengda(The 49th Research Institute of China Electronics Technology Group Corporation,Harbin 150028,China)

机构地区：[1]中国电子科技集团公司第四十九研究所,黑龙江哈尔滨150028

出　　处：《传感器与微系统》2023年第3期117-119,123,共4页Transducer and Microsystem Technologies

摘　　要：针对传统漆包线工艺制备的线性可变差动变压器(LVDT)位移传感器无法在高温环境下工作的问题,提出一种基于高温共烧陶瓷(HTCC)技术制备耐高温LVDT位移传感器敏感芯体的方法。按0~20 mm的量程范围要求,对敏感芯体进行合理优化后,所制备的敏感芯体测量精度可在±1%FS之内与仿真结果相符合。该制备方法在提升耐高温性能的同时可保证测量精度,具有一定的实际应用前景。Aiming at the problem that linear variable differential transformer(LVDT)displacement sensor manufactured by traditional enamelled wire technology cannot work in high temperature environment, a method for fabricating high temperature resistance LVDT displacement sensor sensitive core based on high temperature co-fired ceramic(HTCC)technology is presented.According to the requirements of 0~20 mm range, the measurement precision of the fabricated sensitive core can be within ±1 %FS after reasonable optimization, which is consistent with the simulation results.This method can not only improve the performance of high temperature resistance but also guarantees the measurement precision, so it has a certain practical application prospect.

关 键 词：高温共烧陶瓷 线性可变差动变压器 位移传感器 敏感芯体 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]