固态纳米孔高能束制造方法  

Fabrication method of high energy beam for solid-state nanopore

作　　者：陈威[1,2] 郑李娟[1,2] 艾思棋 刘佑明 王成勇[1,2] 袁志山 CHEN Wei;ZHENG Lijuan;AI Siqi;LIU Youming;WANG Chengyong;YUAN Zhishan(Guangdong Provincial Key Laboratory of Minimally Invasive Surgical Instruments and Manufacture Technology,Guangdong University of Technology,Guangzhou 510006,China;Mechanical and Electrical Engineering,Guangdong University of Technology,Guangzhou 510006,China)

机构地区：[1]广东工业大学,广东省微创手术器械设计与精密制造重点实验室,广州510006 [2]广东工业大学机电工程学院,广州510006

出　　处：《金刚石与磨料磨具工程》2023年第1期1-9,共9页Diamond & Abrasives Engineering

基　　金：广东省自然科学基金(2114050001484)。

摘　　要：固态纳米孔因具有机械性能好、稳定性强、形状易控的优点,在基因检测、蛋白质检测、能量转换、物质分离以及水净化等领域显示出巨大的潜力,并引起众多研究人员关注。其中,形状可控、高效的固态纳米孔制造技术是现实固态纳米孔应用的前提。目前,在常见的固态纳米孔制造方法中,高能束制造方法具有高效率、高精度、高可控制造的优势。本文重点概述高能电子束、聚焦离子束、激光刻蚀法和离子径迹刻蚀法等4种固态纳米孔制造方法及其基本原理,并讨论上述方法的优缺点及其大规模可控制造的可行性。Solid-state nanopores have drawn the interest of numerous researchers due to their excellent mechanical properties,stability,and shape control,which have demonstrated tremendous potential in gene detection,protein detection,energy conversion,material separation,and water purification.And shape-controlled and efficient solid-state nanopore manufacturing technology is the prerequisite for the application of solid-state nanopore.At present,the high energy beam manufacturing method has the advantages of high efficiency,high precision and high manufacturing controllability among the conventional solid state nanopore manufacturing methods.This paper provides an overview of four solid state nanopore fabrication methods including high energy electron beam,focused ion beam,laser etching and ion track etching and their fundamental principles.The benefits and drawbacks of these methods,as well as their feasibility for large-scale controlled fabrication are discussed.

关 键 词：固态纳米孔 高能束制造 制造方法 

分 类 号：TB383[一般工业技术—材料科学与工程] TN249[电子电信—物理电子学]