芯片生产过程中的特气处理自动控制设计  

Automatic Control Design of Special Gas Processing in Chip Production Process

作　　者：荀本舟 XUN Ben-zhou(Shanghai Shengjian Environmental System Technology Co.,Ltd.,Shanghai 201807,China)

机构地区：[1]上海盛剑环境系统科技股份有限公司,上海201807

出　　处：《价值工程》2023年第7期83-85,共3页Value Engineering

摘　　要：自动控制系统对燃烧安全及运维便捷起着至关重要的作用。特气燃烧处理自动控制系统采用S7-1500PLC系统并着重燃烧安全控制进行自控设计。本文介绍了特气的危害与燃烧处理自动控制系统,阐述了涉及到的燃烧串的设计、点火程序设计、硬件与程序的安全控制、报警程序设计、运维手动及刮刀程序设计、以及S7-1500控制系统为主的硬件及程序设计过程。The automatic control system plays a vital role in combustion safety and convenient operation and maintenance.S7-1500 PLC system is adopted for the automatic control system of special gas combustion treatment,and the automatic control design focuses on combustion safety control.This paper introduces the harm of special gas and the automatic control system of combustion treatment,and describes the design of combustion string,ignition program,safety control of hardware and program,alarm program design,operation and maintenance manual and scraper program design,and the hardware and program design process of S7-1500 control system.

关 键 词：特气处理 S7-1500控制系统 燃烧安全控制 自动控制 

分 类 号：TQ116[化学工程—无机化工]