一种片上集成的温度传感器设计  

Design of a temperature sensor integrated on chip

作　　者：莫啸 孔德鑫 李冬 孙金中 路腾腾[1,2] MO Xiao;KONG De-xin;LI Dong;SUN Jin-zhong;LU Teng-teng(Anhui Siliepoch Technology Co.,Ltd;The 38th Research Institute of China Electronics Technology Corporation)

机构地区：[1]安徽芯纪元科技有限公司 [2]中国电子科技集团公司第三十八研究所

出　　处：《中国集成电路》2023年第3期41-46,共6页China lntegrated Circuit

摘　　要：本设计在FinFET器件结构的标准CMOS工艺下进行,实现一种集成在片上系统内部的温度传感器。为解决寄生PNP管电流增益过小对基射电压的影响,温度传感电路基于寄生垂直NPN三极管进行设计,以动态元件匹配、斩波等技术减少电路失调,模数转换采用相关双采样技术的单环二阶单比特量化的电容型Σ△调制器结构,以提高对系统噪声的抑制能力。该温度传感器集成在片上系统内部,实现对片上系统温度的监控。电路仿真及芯片测试结果表明,该温度传感器在-55℃至+125℃的温度范围内,电路仿真精度为±0.15℃,芯片测试精度为±1.5℃。This design is carried out under the standard CMOS process of FinFET device structure, and a temperature sensor integrated in the system on chip is realized. In order to solve the influence of too small current gain of parasitic PNP triode on the base-emission voltage, the temperature sensing circuit is designed based on parasitic vertical NPN triode, and the technology of dynamic component matching and chopping is used to reduce the circuit offset. The analog-to-digital conversion adopts the single loop second-order single bit switch-capacitance type of related double sampling technology Σ△ modulator structure to improve the suppression ability of system noise. The temperature sensor is integrated in the system on chip to monitor the temperature of the system on chip. The circuit simulation and chip test results show that the circuit simulation accuracy is ± 0.15 ℃ and the chip test accuracy is ± 1.5 ℃ in the temperature range of-55 ℃ to + 125 ℃.

关 键 词：垂直NPN管 Σ△-ADC 动态元件匹配 斩波技术 相关双采样 温度传感器 

分 类 号：TP212.11[自动化与计算机技术—检测技术与自动化装置]