激光清洗研究综述(特邀)  

Review of laser cleaning technology(invited)

作　　者：宋峰[1] 陈铭军 陈晅 赵泽家 刘鑫 姚建铨[2] Song Feng;Chen Mingjun;Chen Xuan;Zhao Zejia;Liu Xin;Yao Jianquan(School of Physics,Nankai University,Tianjin 300071,China;College of Precision Instrument and Opto-Electronics Engineering,Tianjin University,Tianjin 300072,China)

机构地区：[1]南开大学物理科学学院,天津300071 [2]天津大学精密仪器与光电子工程学院,天津300072

出　　处：《红外与激光工程》2023年第2期20-41,共22页Infrared and Laser Engineering

基　　金：国家重点研发计划(2022YFB4601500)。

摘　　要：激光清洗是通过把高亮度和方向性好的激光照射到物体待清洗的部位,使激光器发射的光束被污染层和/或基底吸收,通过光剥离、汽化等过程,克服污染物和基底之间的粘附力,使污染物离开物体表面,达到清洗目的,且不损伤物体本身的物理清洗技术。20世纪80年代以后,激光清洗技术得到了越来越多的关注。40年来,激光清洗作为一种新型高效的环保清洗技术,得到了飞速发展,在电子元器件清洗、文物保护和脱漆除锈等领域得到研究并获得了应用。2010年以后,对激光清洗研究进一步深入,在激光清洗的检测和智能控制方面取得较大成果,并且在激光清洗机理方面也取得了进展。中国科学家在这个过程中也做出了贡献。介绍了激光清洗原理、特点、源起,对40余年的激光清洗发展做了综述,并介绍了国内近年来激光清洗的研究动态。Laser with the high brightness and good direction is irradiated to the object to be cleaned. After laser beam is absorbed by the pollution layer and/or substrate, with such processes as light stripping, vaporization, the adhesion force between pollutants and substrate is overcome so that pollutants leave the surface of the object, to achieve the purpose of cleaning, while causing no damage of the object itself. After the 1980s, laser cleaning technology has received more and more attentions. In the past 40 years, as a new efficient environmental cleaning technology, laser cleaning technology has developed rapidly and has been used in electronic components cleaning, cultural relics maintenance, paint and rust removal and other fields. Since 2010, further research on laser cleaning has been carried out, and great achievements have been made in the detection and intelligent control of laser cleaning. Breakthroughs have been made in the mechanism of laser cleaning. Chinese scientists have also made great contributions. The paper summarizes the principle, characteristics, origin and development of laser cleaning technology in the past 40 years, and introduces the development of laser cleaning in China in recent years.

关 键 词：激光清洗 污染物 光剥离 汽化 

分 类 号：O4-1[理学—物理] TN249[电子电信—物理电子学]