基于双频激光干涉相位检测的高精度波片测量  

High-Accuracy Wave Plate Measurement Based on Dual-Frequency Laser Interferometry and Phase Detection

作　　者：陈强华 关裕 周胜 丁锦红 吕洪波 孙启国 罗会甫[2] Chen Qianghua;Guan Yu;Zhou Sheng;Ding Jinhong;LüHongbo;Sun Qiguo;Luo Huifu(School of Mechanical and Materials Engineering,North China University of Technology,Beijing 100144,China;School of Mechanical Engineering,Beijing Institute of Technology,Beijing 100081,China)

机构地区：[1]北方工业大学机械与材料工程学院,北京100144 [2]北京理工大学机械与车辆学院,北京100081

出　　处：《光学学报》2023年第1期102-108,共7页Acta Optica Sinica

基　　金：国家自然科学基金(52075004,50475177,51575004);北京市教育委员会科学研究计划(KM202110009010);北京市自然科学基金(3212003);北方工业大学科研启动基金(110051360002)。

摘　　要：波片精度对偏振光学系统性能有着重要的影响,故需要对其相位延迟量和快轴方位角进行高精度测量。提出了一种新型基于双频激光干涉相位检测的高精度波片测量方法,采用双频激光外差干涉光路,利用一个可旋转半波片和一个角锥反射棱镜测量待测波片,可实现任意波片的相位延迟量和快轴方位角的高精度同时测量。所提方法不受波片、偏振片等双折射器件的方位角精度的影响,从原理上避免了该类系统误差。所设计的系统具有共光路结构,测量稳定性高,信号处理采用相位检测方式相对于一般的光强检测方式测量精度更高。此外,所设计的测量系统中元件很少,结构简单,测量过程快捷。误差分析表明,在现有实验条件下,测量系统的波片相位延迟量的测量不确定度约为3.9′,快轴方位角的测量不确定度约为5′′。实验比对结果表明,所提方法的测量结果与其他方法测量结果的一致性很好。重复性测量实验表明,测量结果的标准偏差约为2′。Objective The accuracy of wave plates has a significant influence on the performance of polarized optical systems, and thus the high-accuracy measurement of their phase retardation and fast axis azimuths is required. Many wave plate measurement methods at present are based on the principle of light intensity measurement. The measurement accuracy is easily affected by light intensity fluctuations, and the requirements for light source and stability of light path are high.Quite a few methods among them cannot measure the fast axis azimuth of the wave plate at the same time. Therefore,many researchers have also studied other measurement methods, such as laser feedback method, to improve the performance of wave plate measurement. In this study, a high-accuracy wave plate measurement method based on dualfrequency laser interferometry and phase detection is proposed. It has good advantages of wave plate measurement.Methods A dual-frequency laser heterodyne interference optical path is constructed by using a rotatable half-wave plate and a corner prism in this study(Fig. 1). The relationship between the phase retardation of the wave plate to be measured and the phase difference between the measured signal and the reference signal is obtained by Jones matrix method. During the measurement, the phase retardation and the fast axis azimuth of the measured wave plate can be obtained by rotating the half wave plate, monitoring the change of phase difference between the measured signal and the reference signal through a phase meter, and recording the maximum value and minimum value as well as the corresponding fast axis azimuth of the half wave plate.Results and Discussions Error analysis shows that the measurement uncertainty of the phase retardation is about 3. 9′,and that of the fast axis azimuth is about 5′′ under the experimental conditions. The experimental comparison results indicate that the result of the proposed method is in good agreement with that of other methods. The repeated experiments show that the measu

关 键 词：测量 波片测量 相位延迟量 快轴方位角 双频激光干涉 相位检测 

分 类 号：O436.3[机械工程—光学工程]