基于LED泵浦的掺铕聚合物光波导放大器  

Eu3+-Doped Polymer Waveguide Amplifier Based on LED Pumping

作　　者：王策 吕子月 黄宇扬 张丹 Wang Ce;LüZiyue;Huang Yuyang;Zhang Dan(School of Electronic Science and Engineering(National Model Microelectronics College),Xiamen University,Xiamen 361005,Fujian,China)

机构地区：[1]厦门大学电子科学与技术学院(国家示范性微电子学院),福建厦门361005

出　　处：《中国激光》2023年第2期15-21,共7页Chinese Journal of Lasers

基　　金：国家自然科学基金(61875170,61107023);国家重点研发计划(2021YFB2800500);厦门大学校长基金(20720150086)。

摘　　要：将铕配合物Eu(DBM)3Phen掺杂在聚甲基丙烯酸甲酯(PMMA)中作为有源材料,分别采用铝掩膜结合电感耦合等离子体(ICP)刻蚀、一步光刻法制备了脊型和倏逝场型两种掺铕聚合物光波导放大器。采用405 nm蓝紫发光二极管(LED)泵浦,在653 nm波长处分别实现了1.9 dB/cm和1.5 dB/cm的相对增益。对掺杂Eu(DBM)3Phen的PMMA薄膜的紫外吸收、荧光发射以及荧光寿命进行了测量表征。结果表明,有机配体的分子内能量传递作用在LED泵浦下可以实现稀土铕离子由5D0能级到7F3能级的跃迁。Objective Plastic optical fibers(POFs)have been widely used in Fiber to the Home(FTTH),automobile optical local area networks(LANs)and fiber-optic sensor fields owing to their large bandwidths,low prices,and easy coupling.POFs exhibit a low loss window in the red band around 650 nm;thus,it is considerably important to use optical waveguide amplifiers to compensate for the propagation loss at a wavelength of 650 nm.Furthermore,optical waveguide amplifiers can be integrated with optical switches,arrayed waveguide gratings,and optical sensors in photonic integrated circuits(PICs)to compensate for optical losses.Research on waveguide amplifiers has often utilized semiconductor lasers as pump sources to excite the intrinsic absorption bands of rare-earth ions.Consequently,the optical power density at the input side of the waveguide can reach approximately 10~6 W/cm~(2)with pumping power of 300 mW at a cross-section of6μm×5μm for the waveguide,which leads to thermal damage in the waveguides and the up-conversion of rare-earth ions.Lanthanide ion complexes with organic ligands exhibit a continuous large absorption band in the blue-violet band,which is suitable for blue-violet light-emitting diode(LED)pumping.The energy absorbed by organic ligands can be effectively utilized to realize the radiative transition of rare-earth ions through intramolecular energy transfer.In addition,the LED pumping method can help improve the thermal stability of waveguides,which is expected to play an important role in optical integrated systems on chips.Methods The absorption spectra of organic ligands,EuCl_3 and Eu(DBM)_3Phen-doped polymethyl methacrylate(PMMA)films,are measured.The fluorescence emission and fluorescence lifetime of the Eu(DBM)_3Phen-doped PMMA film are characterized.Using an aluminum mask combined with inductively coupled plasma(ICP)etching and one-step photolithography,a ridge waveguide and an evanescent field waveguide are fabricated,respectively.Further,the film-forming properties of the doped film and the morpholo

关 键 词：激光器 集成光学器件 光波导放大器 Eu(DBM)3Phen 聚合物 相对增益 

分 类 号：TN256[电子电信—物理电子学]