双通道非分光红外CO_(2)气体传感器设计与测试  

Design and Test of Dual-Channel Non-Dispersive Infrared CO_(2) Gas Sensor

作　　者：董和磊[1,2] 刘灿 靳长明 张磊 张雅楠[1,2] 谭秋林 Dong Helei;Liu Can;Jin Changming;Zhang Lei;Zhang Yanan;Tan Qiulin(State Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan 030051,Shanxi,China;Key Laboratory for Electronic Measurement Technology,North University of China,Taiyuan 030051,Shanxi,China)

机构地区：[1]中北大学省部共建动态测试技术国家重点实验室,山西太原030051 [2]中北大学电子测试技术国防科技重点实验室,山西太原030051

出　　处：《中国激光》2023年第2期116-122,共7页Chinese Journal of Lasers

基　　金：国家重点研发计划(2020YFB2009100);国家自然科学基金面上项目(52175525);中国博士后科学基金特别资助项目(2019T120198)。

摘　　要：针对目前非分光红外(NDIR)CO_(2)传感器灵敏度差、量程小的问题,设计并实现了一种微型双通道NDIR CO_(2)气体传感器。该红外传感器主要由双通道热释电探测器、信号读出与处理电路、温度传感器与光路气室构成。建立了温度、CO_(2)浓度与探测器输出值之间的关系模型,实现了传感器的温度补偿功能。测试结果表明,所设计传感器能够实现在0~40℃温度范围内,0%~5%气体浓度的测量,且在0%~2%浓度下测量误差值小于0.1%,在2%~5%浓度下测量误差值小于0.25%。Objective CO_2 gas sensor is a key device in industrial control,medicine and health protection.Gas sensor based on infrared absorption principle has the outstanding advantage of high selectivity,but it faces the problems of low integration,large size,and low precision.In recent years,with the efforts of major research institutions and universities,the design of infrared sensors is developing rapidly,but it is urgent to solve the limitations of poor sensitivity and small detection range of the sensors.In this paper,a miniaturized non-dispersive infrared CO_2 sensor with the design of dual-band single-gas-channel structure is proposed,which is based on the infrared pyroelectric effect.The temperature compensation technology of the sensor is explored by the standard gas calibration method.The output values of the detector at different concentrations and temperatures are measured,and the relationship among the temperature,CO_2 concentration and output value of the detector is established.Software algorithm is used to realize the temperature compensation function,so as to realize the accurate measurement of gas concentration in different environments.Methods The infrared CO_2 sensor is composed of four main parts:infrared light source,air chamber,dual-channel pyroelectric detector,and main circuit system,as shown in Fig.2.In order to realize the miniaturization of the sensor while maintaining high performance,a C-type multi-reflection air chamber structure is designed to increase the optical path and ensure the length of the interaction between light and gas.Through modular integrated design,a miniaturized air chamber with a height of 8 mm and a diameter of 18 mm is obtained,which minimizes the volume of the sensor.Finally,a miniature infrared CO_2 gas sensor with a diameter of 23 mm and a height of 10 mm is realized.The single-optical-path dual-wavelength differential design concept can effectively eliminate the interference of the air chamber,the light source and impurities,and reduce the influences of environmental

关 键 词：传感器 非分光红外气体传感器 双通道热释电探测器 浓度标定 温度补偿 

分 类 号：TN219[电子电信—物理电子学]