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作 者:叶斯哲 YE Sizhe(Xiamen Institute of Rare Earth Materials,Haixi Institute,Chinese Academy of Sciences,Xiamen,China;Xiamen Key Laboratory of Rare Earth Photoelectric Functional Materials,Xiamen,China)
机构地区:[1]中国科学院海西研究院厦门稀土材料研究中心,福建厦门 [2]厦门市稀土光电功能材料重点实验室,福建厦门
出 处:《光电技术应用》2023年第1期76-82,共7页Electro-Optic Technology Application
基 金:医学光电科学与技术教育部重点实验室,福建省光子技术重点实验室开放课题(JYG2205)。
摘 要:硒化锌多面反射棱镜是滚仰式长波红外导引头光学系统的重要组成部件,其精度直接影响光学系统成像质量。针对棱镜多面体结构及多晶硒化锌材料特点,提出单点金刚石飞刀车削的精密加工方案。对反射棱镜各面位置关系建立数学模型,设计专用工装保证一次装夹加工成型,对车削加工路径进行了仿真。通过实验得到了飞刀车削主轴转速、切削深度、进给速度等参数对硒化锌材料表面质量的影响。最终加工获得的反射棱镜角度误差为12″,面形误差PV:0.13λ,RMS:0.02λ,表面粗糙度Ra:7.39 nm,表面疵病等级:Ⅴ。结果满足设计要求,验证了飞刀车削法精密加工ZnSe多面反射棱镜的工艺方法。Zinc selenide polyhedral reflection prism is an important component of the optical system of a rollpitch long-wave infrared seeker,which directly affects the imaging quality of the optical system.For prism’s complex polyhedron plane structure and the feature of polycrystalline zinc selenide material,a precision processing of single point diamond fly-turning is proposed.A mathematical model is established for the position relationship of each surface of the prism,and a special tooling to ensure one-time clamping and processing is designed.The turning path is simulated,and the effects of parameters such as spindle speed,cutting depth and feed rate on the surface quality of ZnSe are obtained through experiments.The parameters of the reflection prism is obtained,such as 12″angle error,PV:0.13λsurface shape error,0.02λRMS,Ra:7.39 nm surface roughness andⅤsurface imperfections.The design requirements are met.And the process method of precision processing ZnSe polyhedral reflection prism by fly-turning is verified.
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