基于方形开口谐振环的无线激励微波微等离子体阵列源的研究  

Research on Wireless Exciting Microwave Micro-plasma Array Source Based on Square Split Resonant Ring

作　　者：丛茂林 廖斌[1,2] CONG Mao-lin;LIAO Bin(School of Communication and Electronic Engineering,East China Normal University,Shanghai 200241,China;Shanghai Key Laboratory of Multidimensional Information Processing,Shanghai 200241,China)

机构地区：[1]华东师范大学通信与电子工程学院,上海200241 [2]上海市多维度信息处理重点实验室,上海200241

出　　处：《真空电子技术》2023年第1期63-68,共6页Vacuum Electronics

基　　金：上海市多维度信息处理重点实验室开放课题基金资助项目(2020KEY002)

摘　　要：根据天线辐射理论和超材料特性,通过HFSS仿真软件,对基于方形开口谐振环(SRR)的无线激励2.45 GHz微波微等离子体阵列源进行研究。仿真结果表明,SRR的长度、宽度和缝隙宽度、辐射天线与阵列源的距离、偏移距离和谐振环开口方向等参数对微波微等离子体阵列源的S参数、电磁场分布等有较大影响。According to the theory of antenna radiation and the characteristics of meta-material,a wireless exciting microwave micro-plasma array source based on square split resonant ring(SRR)at 2.45 GHz is studied by using HFSS simulation software.The simulation results show that the length,width and gap width of the square SRR,the space and central deviation between the radiation antenna and the array,and the gap orientation of the square SRR have significant effects on the S-parameters,electromagnetic field distribution of the wireless exciting microwave micro-plasma array source.

关 键 词：天线辐射 超材料 矩形微带天线 方形开口谐振环 微波微等离子体阵列源 

分 类 号：O539[理学—等离子体物理]