基于石英音叉探测器的双光谱气体检测技术  

Dual-spectroscopy Gas Detection Technique Based on a Quartz Tuning Fork Detector

作　　者：王强[1] 王浩[1] 肖聪 李劲松[1] WANG Qiang;WANG Hao;XIAO Cong;LI Jinsong(School of Physics and Optoelectronic Engineering,Anhui University,Hefei 230601,China)

机构地区：[1]安徽大学物理与光电工程学院,合肥230601

出　　处：《光子学报》2023年第3期220-228,共9页Acta Photonica Sinica

基　　金：国家自然科学基金(Nos.41875158,61675005)。

摘　　要：将波长调制光声光谱和光热光谱有效结合,提出了一种基于石英音叉探测器和光声光谱与光热光谱技术有效融合的双光谱气体检测技术。以大气中水汽为分析对象,利用1 392 nm附近的近红外半导体激光器搭建了一套基于石英音叉探测器的双光谱探测系统,结合波长调制技术中相位依赖特性,利用差分原理实现了波长调制光声光谱和光热光谱信号的有效叠加和增强,与传统探测方案中采用的单一光谱检测方法相比,有效利用了激光功率,实验结果显示,所提出的双光谱探测技术的总体信噪比分别是光声光谱与光热光谱信噪比的1.97和1.24倍,有效提升了系统检测灵敏度。Laser spectroscopy is a powerful analytical technique based on the interaction process of light and matter (including absorption,reflection,scattering,refraction,interference,etc.),which can provide various useful information (such as composition,concentration,velocity,flux,etc.) by analyzing the detected spectral signal and combing the related physical principles.With the continuous innovation of modern laser light sources and photodetector devices,the laser spectroscopy technique has also been developed rapidly.In terms of the three core components of the laser spectroscopy system (i.e.,laser light source,absorption cell,and photodetector) and signal enhancement and noise suppression methods,various advanced laser spectroscopy techniques or detection methods have been developed.Quartzenhanced photoacoustic spectroscopy and photothermal spectroscopy is a new and rapidly developing laser spectroscopy technique,which utilizes miniaturized quartz tuning forks as detectors with the advantages of small size,high quality factor,and low cost.Quartz-enhanced photoacoustic spectroscopy is a spectroscopic technique that measuring the aco of light and gas in a radiation-free relaxation process,which utilizes the resonance effect and piezoelectric effect of the quartz tuning fork as an acoustic detector.However,the quartz-enhanced photothermal spectroscopy technique is based on the thermoelastic effect using quartz tuning fork as a light detector.To date,quartz-based enhanced photoacoustic and photothermal spectroscopy have been successfully applied to detect many small molecules with narrow absorption spectra and several large molecules with broad,unresolved spectral absorption features.These two techniques have been widely used for developing real-time and compact trace gas sensors with high sensitivity and selectivity.In this paper,a dual-spectroscopy detection technique based on quartz tuning forks is proposed to further improve the sensitivity of the quartz tuning fork based spectroscopic detection technique.To demonst

关 键 词：光声光谱 光热光谱 石英音叉探测器 双光谱技术 气体探测 

分 类 号：O433.4[机械工程—光学工程]