激光冷加工孔穿透光谱检测技术研究  

Research on Laser Cold Machining Hole Penetration Spectroscopy Detection Technology

作　　者：闫庆[1] 彭波 汪丽[1] 王东 赵华龙[2] 高飞[1] 华灯鑫[1] YAN Qing;PENG Bo;WANG Li;WANG Dong;ZHAO Hualong;GAO Fei;HUA Dengxin(School of Mechanical and Precision Instrument Engineering,Xi′an University of Technology,Xi′an 710048,China;Research Center for Photonic Manufacturing System and Application,Xi′an Institute of Optics and Precision Mechanics,Chinese Academy of Sciences,Xi′an 710119,China)

机构地区：[1]西安理工大学机械与精密仪器工程学院,西安710048 [2]中国科学院西安光学精密机械研究所光子制造系统与应用研究中心,西安710119

出　　处：《光子学报》2023年第3期241-249,共9页Acta Photonica Sinica

基　　金：国家重点研发计划(No.2021YFF0701103);陕西省教育厅重点科研计划(No.22JY049)。

摘　　要：为了避免对存在空气内腔器件加工过程中对壁损伤问题,需要实时判断孔穿透状态。针对该问题提出基于激光诱导击穿光谱检测技术的飞秒激光制孔的孔穿透检测方法,选取Cr(I)521.531 nm为特征发射光谱,利用特征谱线强度的变化实现孔穿透状态的判断。设计了光谱检测实验系统并在孔加工实验过程中实现了特征光谱的采集与孔穿透状态的判断,验证了该方法在解决孔加工过程中避免产生对壁损伤问题的可行性。The ultra-high peak power and ultra-short pulse time characteristics of the femtosecond laser allow it to act quickly on a specific area during machining,and the material in the area of the laser beam is removed in the form of a plasma eruption to achieve cold machining with almost no thermal impact on the surrounding material.Laser cold machining technology is widely used because of its high processing accuracy,small heat-affected zone and high machining efficiency.One of the important applications is the machining of air film holes in aero-engine turbine blades.Due to the existence of hollow cavities and the close distance between the opposite walls of the aero-engine turbine blades,the hole making process is prone to contramural damage.Therefore,in order to avoid contramural damage and improve the quality of air film hole machining,a real-time detecting system needs to be developed to judge the hole penetration status during the hole machining in real time.Laser Induced Breakdown Spectroscopy(LIBS)is a kind of atomic emission spectroscopy technology,which has a fast response time and can achieve real-time detection and analysis of the target under test.In the LIBS detection system,a spectrometer is used to collect the emission spectra excited during the plasma cooling process of femtosecond laser machining,and the elements corresponding to each spectral line can be identified according to the characteristic wavelength of atomic or ion emission spectra in a specific wavelength band,and quantitative analysis can be achieved by measuring the intensity of emission spectra captured at a specific wavelength.Aiming at the problem of contramural damage in the machining of aero-engine turbine blade with femtosecond laser,a hole penetration detection scheme based on laser-induced breakdown spectroscopy detection technology of femtosecond laser hole making is proposed.Based on the elemental analysis of the material and the information of the LIBS spectrogram obtained in the wavelength 520~560 nm during processing,the emi

关 键 词：激光冷加工 激光诱导击穿光谱 对壁损伤 特征谱线 穿透检测 

分 类 号：O436[机械工程—光学工程]