通过氢还原热处理提升TiO_(2)薄膜的抗菌性能  

Antibacterial Properties of TiO2 Film Improved by Hydrogen Reduction Heat Treatment

作　　者：赵云[1,2] 何伟伟 许建兵 苏虹阳 刘鹏 乐恢榕[1] 陈迪 ZHAO Yun;HE Weiwei;XU Jianbing;SU Hongyang;LIU Peng;LE Huirong;CHEN Di(The Future Laboratory,Tsinghua University,Beijing 100084,China;Academy of Art&Design,Tsinghua University,Beijing 100084,China)

机构地区：[1]清华大学未来实验室,北京100084 [2]清华大学美术学院,北京100084

出　　处：《中国表面工程》2023年第1期77-84,共8页China Surface Engineering

基　　金：国家重点研发计划(2021YFA0718900);佛山-清华产学研合作协同创新专项资金(2020THFS0122);国家自然科学基金(NSCF52102137);新型陶瓷与精细工艺国家重点实验室开放课题(KF202101)资助项目。

摘　　要：提升在可见光区间的抗菌效率一直是二氧化钛(TiO_(2))抗菌性能研究的重要方向.采用脉冲激光沉积(PLD)制备TiO_(2)薄膜,并通过氢还原热处理的方法提升TiO_(2)表面的氧空位浓度从而增强其抗菌性能.结果发现,在以单晶氧化钇稳定的氧化锆(YSZ)为衬底时,生长的TiO_(2)薄膜为高度择优取向的锐钛矿相.生长温度越高,锐钛矿相的XRD衍射峰越强,薄膜越致密.将在600℃下生长的350 nm厚的TiO_(2)薄膜进行抗菌性能测试,发现其抗菌率约为86%.对样品进一步在4%H2氛围下进行还原处理,发现其抗菌率提升到约为97%.通过XPS、UV-Visible和PL测试,发现TiO2经过还原热处理后在其表面形成更多的氧空位,在TiO_(2)带隙中形成氧空位缺陷能级,导致在可见光区域吸光性能增强,使其具有更高的抗菌性能.通过氢还原过程调控材料的缺陷组成,并研究TiO_(2)薄膜的光催化抗菌性能及抗菌机理.这种简易的调控TiO_(2)光吸收的方法可为规模生长提供技术可行性.Titanium dioxide(TiO_(2))has good photocatalytic activity and can degrade environmental pollutants by oxidation.It has been used in photocatalysis,on antibacterial,antifouling and self-cleaning surfaces,and ultraviolet(UV)detectors.However,it predominantly absorbs UV light and has low absorption of visible light.Improving antibacterial efficiency in the visible light region has consistently been a key research direction for TiO_(2)antibacterial properties.Currently,to improve TiO_(2)photocatalytic efficiency under visible light,multiple schemes have been proposed,such as metal or non-metal doping,and laser surface or vacuum heat treatment.These methods introduce point defects in the TiO_(2)lattice,and narrow the band gap by changing the semiconductor energy band and introducing impurities or defect energy levels in the band gap,thus enhancing visible light absorption.To better understand the TiO_(2)antibacterial mechanism,it is necessary to accurately control its morphology,composition,and crystal structure.Thin film materials adequately meet these requirements.Recently,pulsed laser deposition(PLD)has become a widely adopted film deposition technology owing to its simple system setup,wide range of deposition conditions,material selection and ability to prepare high-quality repeatable films.In this study,TiO_(2)thin films are prepared using PLD,and the oxygen vacancy concentration on the TiO_(2)surface is increased by hydrogen reduction heat treatment to enhance its antibacterial properties.Results demonstrate that the TiO_(2)films grown on a single crystal yttria stabilized zirconia(YSZ)substrate are the highly preferred anatase phase,and the higher the growth temperature,the stronger the X-ray diffraction(XRD)peak of the anatase phase and the denser the film.The antibacterial properties of 350 nm thick TiO2 film grown at 600℃were measured and it was identified that the antibacterial rate is approximately 86%.The sample was further reduced in a 4%H2 atmosphere,and it was confirmed that the antibacterial rate in

关 键 词：脉冲激光沉积 TiO_(2)薄膜 抗菌 还原热处理 光吸收效率 

分 类 号：TB34[一般工业技术—材料科学与工程]