浅析半导体硅片行业废水处理工程  

Brief Analysis of Wastewater Treatment Engineering in Semiconductor Silicon Wafer Industry

作　　者：谭淑月 Tan Shuyue(Zibo Green Energy Core Electronic Technology Co.,Ltd.,Zhibo 255000,China)

机构地区：[1]淄博绿能芯创电子科技有限公司,山东淄博255000

出　　处：《皮革制作与环保科技》2023年第4期25-27,共3页Leather Manufacture and Environmental Technology

摘　　要：近年来国内半导体产业发展态势良好,硅片生产规模不断扩大,但随之出现的就是废水排放及处理问题。文中以300 mm硅片生产废水处理工程为例,根据工程概况,阐述含氟废水、CMP废水、含铜废水的处理工艺,并以此为基础提出改进建议。In recent years, the domestic semiconductor industry has developed well, and the scale of silicon wafer production has been expanding, but the problem of wastewater discharge and treatment has emerged. Taking the wastewater treatment project of 300 mm silicon wafer production as an example, the treatment process of fl uorine-containing wastewater, CMP wastewater and copper-containing wastewater is described according to the project overview, and suggestions for improvement are put forward on this basis.

关 键 词：300 mm硅片 半导体厂 废水处理 酸碱废水 

分 类 号：TS5[轻工技术与工程—皮革化学与工程]