激光烧蚀数值计算的研究现状  

Research Status of Numerical Calculation of Laser Ablation

作　　者：何超敏 邱长军[1] HE Chaomin;QIU Changjun(Hunan Key Laboratory of Equipment Safety Service Technology,University of South China,Hengyang 421001)

机构地区：[1]南华大学超常环境下装备安全服役技术湖南省重点实验室,衡阳421001

出　　处：《现代制造技术与装备》2023年第2期59-61,共3页Modern Manufacturing Technology and Equipment

摘　　要：激光烧蚀技术在清洗、刻蚀等领域中应用广泛,具有高精度、高效率等优点。激光工艺参数对烧蚀过程影响较大,利用有限元数值计算可以节省时间、降低成本及优化参数。文章综述数值模拟激光烧蚀的研究现状,阐述常用的热源模型,展望了激光烧蚀数值计算的发展方向。Laser ablation technology is widely used in cleaning, etching and other fields, with the advantages of high precision and high efficiency. The laser process parameters have a great influence on the ablation process. Finite element numerical calculation can save time, reduce costs and optimize parameters. This paper summarizes the research status of numerical simulation of laser ablation, expounds the commonly used heat source models, and looks forward to the development of laser ablation numerical calculation.

关 键 词：激光烧蚀 数值计算 研究现状 热源模型 

分 类 号：TN249[电子电信—物理电子学]