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作 者:张羽洲 ZHANG Yuzhou(Southwest Institute of Physics of Nuclear Industry,Chengdu 610000)
出 处:《现代制造技术与装备》2023年第2期194-196,共3页Modern Manufacturing Technology and Equipment
摘 要:磁控溅射是一种常见的玻璃镀膜工艺,具有工艺简单、真空度易控制等优点。文章探讨基于磁控溅射技术的玻璃真空镀膜自动控制技术,根据玻璃镀膜的工艺流程,设计了一种通用的真空玻璃镀膜机控制系统。该系统以S7-400型的可编程逻辑控制器(Programmable Logic Controller,PLC)为控制核心,实现了玻璃真空镀膜的逻辑控制和现场数据采集与处理。系统上位机监控采用视窗控制中心(Windows Control Center,WinCC)组态软件设计,并利用Modbus协议实现通信。Magnetron sputtering is a common glass coating process, which has the advantages of simple process and easy control of vacuum degree. In this paper, the automatic control of glass vacuum coating based on magnetron sputtering technology is deeply discussed. According to the process flow of glass coating, a general control system of vacuum glass coating machine is designed.The system uses S7-400 Programmable Logic Controller(PLC) as the control core to realize the logic control of glass vacuum coating and field data acquisition and processing. The upper computer monitoring is designed by WinCC configuration software,and the system communication is realized by Modbus protocol.
关 键 词:可编程逻辑控制器(PLC) 视窗控制中心(WinCC)组态 玻璃镀膜机 磁控溅射镀膜 自动控制
分 类 号:TQ171.5[化学工程—玻璃工业] TP273[化学工程—硅酸盐工业]
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