Comparison of pulse-modulated and continuous operation modes of a radio-frequency inductive ion source  

作　　者：Ilya ZADIRIEV Elena KRALKINA Konstantin VAVILIN Alexander NIKONOV Georgy SHVIDKIY 

机构地区：[1]Physical Electronics Department,Faculty of Physics,Lomonosov Moscow State University,Moscow 119991,Russia

出　　处：《Plasma Science and Technology》2023年第2期131-145,共15页等离子体科学和技术（英文版）

基　　金：the Russian Science Foundation(No.21-72-10090)。

摘　　要：The paper describes an experimental study of the characteristics of a pulse-modulated radiofrequency(RF)discharge sustained at low pressures,typical of the operating modes of RF gridded ion sources.The motivation for the study is the question of whether the RF pulsemodulated mode can increase the efficiency of the ion source.The ion current values extracted from an RF inductive ion source operating in continuous and pulse-modulated modes were compared.The experimental data were also compared with the parameter calculations based on a0D numerical model of the discharge.The measurements showed that the pulse-modulated operation mode of the RF ion source had a noticeable advantage when the power of the RF generator was 140 W or lower.However,as the generator power increased,the advantage was lost because the pulse-modulated operation mode,having a higher RF power instant value,entered the region of existence sooner than the continuous mode,where the ion production cost begins to grow with RF power.

关 键 词：discharge plasma radio frequency(RF) PULSE ELECTRONS ions 

分 类 号：O53[理学—等离子体物理]