磁悬浮转子真空计转子轴向悬浮建模与优化设计  

Modeling and Optimization Design for Axial Displacement Detection of Rotor in Spinning Rotor Gauge

作　　者：李博文 李得天[1] 习振华[1] 郭美如[1] 周明旭 贾文杰 任正宜 李宇 LI Bowen;LI Detian;XI Zhenhua;GUO Meiru;ZHOU Mingxu;JIA Wenjie;REN Zhengyi;LI Yu(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China;School of Mechanical Engineering and Automation,Northeastern University,Shenyang 110819,China)

机构地区：[1]兰州空间技术物理研究所、真空技术与物理重点实验室,兰州730000 [2]东北大学机械工程与自动化学院,沈阳110819

出　　处：《真空科学与技术学报》2023年第1期13-20,共8页Chinese Journal of Vacuum Science and Technology

摘　　要：为满足磁悬浮转子真空计球形转子在真空中的轴向位移测量与悬浮控制需求,针对其同时加载悬浮直流电流和电涡流传感器交流激励的悬浮系统,建立了基于交流电桥结构的交直流耦合的频域模型。采用四阶龙格库塔法解算其悬浮过程的位移响应,结果显示交流激励的加载为磁悬浮系统引入了非线性因素。制作空气磁芯的电涡流传感器线圈,设计测量电路并制作PCB板,实验分析交流激励产生的电涡流对磁悬浮转子真空计转子悬浮控制的影响。通过对线圈半径参数进行优化实现了对交流作用所产生影响的控制,为磁悬浮转子真空计的优化设计提供了理论指导。In order to meet the requirements of axial displacement measurement and suspension of the spherical rotor of spinning rotor gauge in a vacuum,an AC-DC coupled frequency domain model based on AC bridge structure is established for its magnetic levitation system loaded with both levitating DC current and eddy current sensor AC excitation.The fourth-order Runge-Kutta method is used to calculate the displacement response of the levitation process.The results show that the loading of the AC excitation introduces nonlinear factors into the magnetic levitation system.According to the above consideration,the eddy current sensor with the air magnetic core is fabricated and the measurement circuit is designed.The influence of the eddy current generated by AC excitation on the magnetic levitation system of the spinning rotor gauge is analyzed experimentally.The influence of the AC action is controlled by optimizing the coil radius parameters.The influence on the AC action is realized by optimizing the coil radius parameters,which provides theoretical guidance for the optimal design of the magnetic levitation rotor vacuum gauge.

关 键 词：真空计量 磁悬浮转子真空计 位移检测 电涡流传感器 

分 类 号：TB772[一般工业技术—真空技术]