废显影液中四甲基氢氧化铵的回收  

The Recovery of Tetramethylammonium Hydroxide in Used Developer

作　　者：施利君 胡磊 魏攀龙 Shi Lijun;Hu Lei;Wei Panlong(Suzhou Kzone Equipment Technology Co.,Ltd.,Suzhou 215000,China)

机构地区：[1]苏州晶洲装备科技有限公司,江苏苏州215000

出　　处：《广东化工》2023年第5期148-150,共3页Guangdong Chemical Industry

基　　金：新型半导体显示AMOLED湿制程智能化柔性生产线研发及产业化项目(BA2020039)。

摘　　要：本文主要研究了高分子废显影液中四甲基氢氧化铵(TMAH)的回收工艺,在不同温度、压力、浓度条件下,研究了废显影液经过纳滤后的COD含量以及TMAH回收率,结果表明:COD含量主要受温度影响较大,TMAH回收率主要受初始浓度影响较大。根据废液的实际条件,综合考虑提出纳滤法回收TMAH较优的条件为室温,1.5 MPa;在此条件下,处理后的废显影液COD含量可以控制在40 ppm以下,TMAH回收率能够达到85%以上。In this paper,the recovery technology of tetramethylammonium hydroxide(TMAH)used in macromolecule developer was studied.The COD value and yield of TMAH were discussed after the developer through nanofiltration(NF)under different temperature,pressure and concentration.The results show that the main influencing factor of COD is the processing temperature,and the main influencing factor of the yield of TMAH is the initial concentration of used macromolecule developer.According to these results,the most suitable processing conditions of NF are under room temperature and 1.5 MPa.The yield of TMAH is more than 85%and the COD can be controlled under 40 ppm under these conditions.

关 键 词：纳滤 四甲基氢氧化铵 循环回用 显影液 高分子 

分 类 号：TQ[化学工程]