MEMS光学声传感器  

MEMS Optical Acoustic Sensor

作　　者：郑永秋[1] 陈佳敏 赵馨瑜 白建东 武丽云 薛晨阳[1] Zheng Yongqiu;Chen Jiamin;Zhao Xinyu;Bai Jiandong;Wu Liyun;Xue Chenyang(State Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan 030051,Shanxi,China;School of Software,North University of China,Taiyuan 030051,Shanxi,China)

机构地区：[1]中北大学省部共建动态测试技术国家重点实验室,山西太原030051 [2]中北大学软件学院,山西太原030051

出　　处：《激光与光电子学进展》2023年第3期263-279,共17页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(62131018,12104417);山西省基础研究计划资助项目(202103021222012);山西省研究生创新项目(2021Y620)。

摘　　要：结合光纤工作频带宽、传输损耗小以及微机电系统(MEMS)制造工艺可实现微小型化、批量化和高一致性生产的优势,MEMS光学声传感器表现出高灵敏度、宽频带、大动态范围和高信噪比的优异声探测性能,受到了科研人员的普遍关注和深入研究。根据声敏感单元结构不同,将MEMS光学声传感器分为微结构光纤光栅型、光纤干涉仪型和微谐振腔型。然后,分别介绍了不同类型MEMS光学声传感器的声敏感原理,并在此基础上讨论了它们在不同声探测领域中的研究现状以及目前最为成熟的应用领域。最后展望了MEMS光学声传感器在MEMS工艺逐渐成熟的促使下,可与硅基光电子集成技术相结合实现系统片上集成的未来发展趋势。The operating bandwidth and transmission loss of optical fiber are wide and low.Microelectro mechanical system(MEMS)manufacturing process can achieve miniaturization,mass production,and high consistency.By combining the above two advantages,MEMS optical acoustic sensors exhibit excellent acoustic detection performance with high sensitivity,wide frequency band,large dynamic range,and high signaltonoise ratio,which has attracted widespread attention and indepth research by researchers.According to the different structures of acoustic sensing units,MEMS optical acoustic sensors are divided into microstructured fiber grating types,fiber interferometer types,and microresonator types.The sound detection principle of different MEMS optical acoustic sensors are introduced,respectively.Then their research status in the field of different sound detections and the most mature application fields of them are discussed.Finally,the future development trend of MEMS optical acoustic sensors,which can be combined with siliconbased optoelectronic integration technology to realize system onchip integration,is prospected.

关 键 词：光纤光学 微机电系统制造工艺 声传感器 微结构光纤光栅 光纤干涉仪 微谐振腔 

分 类 号：TN253[电子电信—物理电子学]