共焦三维超精密测量技术研究进展  

Progress in confocal 3D ultra-precision measurement technology

作　　者：黄向东[1,2] 孙壮 段剑秋 王伟波[1,2] HUANG Xiangdong;SUN Zhuang;DUAN Jianqiu;WANG Weibo(Centre of Ultra-precision Optoelectronic Instrument Engineering,School of Instrumentation Science and Engineering,Harbin Institute of Technology,Harbin 150080,China;Key Lab of Ultra-Precision Intelligent Instrumentation,Harbin Institute of Technology,Ministry of Industry and Information Technology,Harbin 150080,China)

机构地区：[1]哈尔滨工业大学仪器科学与工程学院超精密光电仪器工程研究所,黑龙江哈尔滨150080 [2]哈尔滨工业大学超精密仪器及智能化工信部重点实验室,黑龙江哈尔滨150080

出　　处：《计测技术》2023年第1期48-57,共10页Metrology & Measurement Technology

基　　金：国家自然科学基金面上资助项目(52275526,52275527,51975161)。

摘　　要：三维超精密测量技术对提升高端装备制造质量具有基础支撑作用。随着先进制造技术的不断进步,减小系统测量误差和扩大测量范围已成为三维超精密测量技术发展的关键。近年来,共焦三维测量技术发展迅猛,其应用领域也从生物医学逐步扩展到加工制造领域。本文系统介绍了共焦三维测量技术的研究现状和应用进展,从技术原理角度阐述了提高共焦三维测量分辨力以及扩大共焦三维测量范围的方法,对比总结了干涉共焦测量、差动共焦三维测量、光谱共焦测量等技术的相关研究成果,详细介绍了共焦三维测量技术在表面轮廓测量、微结构特征尺寸测量和关键部件内间隙测量等领域的应用情况,并在此基础上,对共焦三维测量技术的未来发展方向进行了展望,以期为后续研究提供技术参考。Three-dimensional ultra-precision measurement technology plays a basic supporting role in improving high-end equipment manufacturing quality.With the progress of advanced manufacturing technology,improving measurement accuracy and expanding measurement range have become the key to the development of 3D ultra-precision measurement technology.In recent years,confocal 3D measurement technology has developed rapidly,and its application has gradually expanded from the biomedicine engineering to the manufacturing industry.This paper systematically introduces the research status and application progress of confocal measurement technology.The methods to improve the resolution of confocal 3D measurement and expand its measurement range are expounded from the perspective of technical principles.The relevant research results of interferometric confocal measurement,differential confocal measurement and spectral confocal measurement are compared and summarized.The application of confocal 3D measurement technology in surface profile measurement,microstructure feature size measurement and internal clearance measurement of key components are introduced in detail.On this basis,the future development direction of confocal 3D measurement technology is prospected with a view to providing technical reference for subsequent research.

关 键 词：精密仪器 轮廓测量 共焦显微 三维测量 超分辨 

分 类 号：TB9[一般工业技术—计量学]