光学微透镜阵列成像质量预测和测量  

Imaging Quality Prediction and Measurement for Optical Microlens Array

作　　者：卫劲锋 王海龙[1] 杜雪[2] 王素娟[1] Wei Jinfeng;Wang Hailong;Suet To;Wang Sujuan(State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment,Guangdong University of Technology,Guangzhou 510006,Guangdong,China;State Key Laboratory in Ultra-Precision Machining Technology,The Hong Kong Polytechnic University,Hongkong 999077,China)

机构地区：[1]广东工业大学省部共建精密电子制造技术与装备国家重点实验室,广东广州510006 [2]香港理工大学超精密加工技术国家重点实验室,中国香港999077

出　　处：《光学学报》2023年第4期64-74,共11页Acta Optica Sinica

基　　金：国家自然科学基金(51975128)。

摘　　要：为了研究微透镜阵列成像质量的影响因素,针对慢刀伺服加工和紫外(UV)光固化工艺制备的微透镜阵列,引入微透镜阵列镜片的误差,建立基于Zemax光学软件的光学微透镜阵列成像仿真模型,分析透镜单元的高度、曲率半径、入瞳直径等误差对微透镜阵列成像质量的影响。搭建光学测试平台对评价微透镜阵列成像性能的光学参数进行检测,包括各透镜单元的焦斑大小、位置误差及其焦距值,并利用点扩散函数(PSF)曲线的半峰全宽值对光场成像结果进行成像质量评价,测量得到微透镜阵列的焦距标准误差为0.12 mm。将测量结果与仿真结果相比,可得PSF曲线的半峰全宽值误差在12%左右,证明了仿真模型的准确性。利用仿真和实验的方法建立了微透镜阵列镜片误差与其光学成像质量之间的关系,这可为基于功能实现的光学微透镜阵列的超精密加工工艺提供理论基础和指导。Objective To study the influencing factors of imaging quality of microlens arrays(MLAs),this paper conducts optical simulations and experiments to establish the relationship between lens errors and optical imaging quality of MLAs.The results can provide a theoretical basis and guidance for the establishment of function-driven ultra-precision machining technology for optical MLAs.The methods for preparing MLAs can be divided into direct and indirect methods considering the necessity of making masks or molds with three-dimensional concave structures.In any case,the manufacturing errors will eventually be mapped onto the lenses and have an impact on the optical performance of the lenses.Most published studies on the imaging simulation of MLAs do not consider the impact of errors on imaging performance.Meanwhile,the image obtained by MLAs,falling within indirect computational imaging,is the calculation result based on the information received from the sensor.The existing studies on the optical performance measurement of MLAs,however,mainly analyze the image information directly received from the sensor.Therefore,for the MLAs produced by the slow tool servo diamond turning and the UV light curing process,a simulation model of optical MLAs is developed in the optical software Zemax,and the lens errors are introduced into the simulation of imaging performance.In this paper,the errors include the depth error and curvature radius error of the lens unit,as well as the error of the entrance pupil diameter.Moreover,a platform for the optical performance measurement of MLAs is established to test the imaging performance of MLAs,which applies the calculated final imaging results for imaging quality evaluation.Finally,the accuracy of the simulation model is verified by the comparison of the simulation and experimental results.Methods Both simulation and experiments are applied in this study.Zemax is the optical design software of Zemax Development Corporation of the United States.It can calculate the point spread function(PSF)c

关 键 词：成像系统 微透镜阵列 ZEMAX 成像质量 光学性能 

分 类 号：TP394.1[自动化与计算机技术—计算机应用技术] TH691.9[自动化与计算机技术—计算机科学与技术]