基于双光梳的激光吸收谱真空分压力测量技术研究  

Research on Vacuum Partial Pressure Measurement Technology based on Dual⁃comb with Laser Absorption Spectrum

作　　者：范栋 李得天[1,2] 成永军 代虎[1] 习振华[1] 贾文杰[1] FAN Dong;LI De-tian;CHENG Yong-jun;DAI Hu;XI Zhen-hua;JIA Wen-jie(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China;School of Mechanical Engineering&Automation,Northeastern University,Shenyang 110819,China)

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000 [2]东北大学机械工程与自动化学院,沈阳110819

出　　处：《宇航计测技术》2023年第1期1-5,67,共6页Journal of Astronautic Metrology and Measurement

摘　　要：为了提高真空分压力测量的准确度和灵敏度,弥补传统测量方法的固有缺陷,真空分压力将结合理想气体定律,使用气体密度来表征。利用气体分子的红外吸收光谱,通过双光梳光谱技术测量其对特定波长光的吸收可实现对混合气体中目标气体密度的精确测量,进而反演出真空分压力。研建了基于电光双光梳的真空分压力测量系统,结合双光梳外差光谱技术与腔增强光谱技术,实现了非侵入、大动态、高速度的真空分压力测量。实验对CO_(2),CO,N_(2)三元混合气体中CO_(2)与CO的真空分压力进行了测量,其相对误差分别为2.84%和2.77%。通过不确定度分析得出,吸收线强度误差是真空分压力测量中最主要的不确定度分量。To improve the accuracy and sensitivity of vacuum partial pressure measurement and make up for the inherent defects of traditional measurement methods,the vacuum partial pressure will be characterized by gas density in combination with the ideal gas law.By using the infrared absorption spectrum of gas molecules and measuring the absorption of specific wavelength light by dual⁃comb spectroscopy,the density of target gas in mixed gas can be accurately measured,and then the vacuum partial pressure can be inversely obtained.A vacuum partial pressure measurement system based on electro⁃optic dual⁃comb has been developed,combined with dual⁃comb heterodyne spectroscopy and cavity⁃enhanced spectroscopy,to achieve non⁃invasive,large dynamic,and high⁃speed vacuum partial pressure measurement.The vacuum partial pressure of CO_(2)and CO in the ternary mixture of CO_(2),CO and N_(2)was measured.The relative errors were 2.84%and 2.77%respectively.Through the uncertainty analysis,it is concluded that the absorption line strength error is the most important uncertainty component in the vacuum partial pressure measurement.

关 键 词：真空分压力 电光双光梳 吸收光谱 

分 类 号：TB771[一般工业技术—真空技术]