模拟空间原子氧辐照下X射线光电子能谱仪的原位表征功能开发  

Functional Development of In-Situ Characterization of X-Ray Photoelectron Spectrometer Under Simulated Space Atomic Oxygen Irradiation

作　　者：刘建 剡珍 郝俊英[1,3] 刘维民 LIU Jian;YAN Zhen;HAO Junying;LIU Weimin(State Key Laboratory of Solid Lubrication,Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences,Lanzhou 730000,China;University of Chinese Academy of Sciences,Beijing 100049,China;Qingdao Center of Resource Chemistry and New Materials,Qingdao 266000,Shandong China)

机构地区：[1]中国科学院兰州化学物理研究所润滑材料全国重点实验室,甘肃兰州730000 [2]中国科学院大学,北京100049 [3]青岛市资源化学与新材料研究中心,山东青岛266000

出　　处：《分析测试技术与仪器》2023年第1期37-42,共6页Analysis and Testing Technology and Instruments

基　　金：中国科学院仪器设备功能开发技术创新项目(2023g107)。

摘　　要：对现有的X射线光电子能谱仪进行功能开发,在不改变仪器工作原理、不影响现有功能的前提下,将研制的空间交变温度原子氧辐照装置集成到其快速进样室,重点解决集群结构的匹配和性能兼容问题,实现模拟空间交变温度原子氧辐照环境下材料的原位表征功能.采用Kapton膜的质量损失方法测试空间交变温度原子氧辐照装置的原子氧通量密度,氧气流量、偏压和微波电流均对原子氧通量密度有较大影响.系统测试表明,原子氧辐照使WS 2薄膜表面发生了严重氧化,影响了薄膜的化学组成.不同温度原子氧辐照导致了不可忽略的化学组成与结构的差异.The functional development was carried out on an existing X-ray photoelectron spectrometer.The developed space alternating temperature atomic oxygen(AO)irradiation device was integrated into the fast sampling chamber without changing the operating principle and the existing functions.In-situ characterization of materials under the simulated space alternating temperature AO irradiation was realized through solving the problems of cluster structure matching and performance compatibility.The AO flux of space alternating temperature atomic oxygenirradiation device was measured using the method of mass loss of Kapton.All the oxygen flux,bias pressure and microwave current have great effects on the AO flux.The system test showed that the structure and composition of WS 2 film were changed greatly by the AO irradiation,and the difference in chemical composition and structure caused by the AO irradiation at different temperature were not negligible.

关 键 词：X射线光电子能谱仪 原子氧辐照 温度交变 原位表征 WS_(2)薄膜 

分 类 号：O657[理学—分析化学] O641[理学—化学] TH842[机械工程—仪器科学与技术]