硼扩散设备若干难点问题的研究  

STUDY ON SOME DIFFICULT PROBLEMS OF BORON DIFFUSION EQUIPMENT

作　　者：彭浩 赵志然 龙辉 郭浩 Peng Hao;Zhao Zhiran;Long Hui;Guo Hao(Hunan Red Solar New Energy Science and Technology Co.,Ltd.,Changsha 410221,China)

机构地区：[1]湖南红太阳光电科技有限公司,长沙410221

出　　处：《太阳能》2023年第3期52-57,共6页Solar Energy

摘　　要：随着针对n型太阳电池的投资提速,国内光伏企业积极开展TOPCon太阳电池布局,产业化进程得到加速,推进新技术落地。硼扩散设备作为TOPCon太阳电池技术的关键工艺设备之一,获得了市场极大的关注。针对硼扩散设备使用过程中遇到的不同类型硼源的问题,通过分析各种硼源的特性,提出了相应的硼源处理方案,并验证了硼源控制效果;针对副产物硼硅玻璃(BSG)粘连的问题,通过分析副产物的特点和危害,提出了斜率升降温功能;针对高能耗的问题,通过分析能耗的主要来源,提出了设备加热功率输出比功能。研究结果表明:所提出的这些方法能有效解决这几个难点问题,有助于提高硼扩散设备的稳定性。With the acceleration of investment in n-type solar cells,domestic PV enterprises have actively carried out the layout of TOPcon solar cells,the industrialization process has been accelerated,and the implementation of new technologies has been promoted.As one of the key process equipment of TOPcon solar cell technology,boron diffusion equipment has received great attention from the market.This paper aiming at the problems of different types of boron sources encountered in the use of boron diffusion equipment,through analyzing the characteristics of various boron sources,the corresponding boron source treatment scheme is proposed,and the boron source control effect is verified.Aiming at the problem of adhesion of by-product BSG,the function of slope rise and fall temperature is proposed by analyzing the characteristics and hazards of by-product.Aiming at the problem of high energy consumption,the equipment heating power output ratio function is proposed by analyzing the main sources of energy consumption.The research results show that these methods can effectively solve these difficult problems and help to improve the stability of the boron diffusion equipment.

关 键 词：TOPCon太阳电池 硼扩散设备 硼源 硼硅玻璃 高能耗 

分 类 号：TM914.41[电气工程—电力电子与电力传动]