Periodic transparent nanowires in ITO film fabricated via femtosecond laser direct writing  

作　　者：Qilin Jiang Long Chen Jukun Liu Yuchan Zhang Shian Zhang Donghai Feng Tianqing Jia Peng Zhou Qian Wang Zhenrong Sun Hongxing Xu 

机构地区：[1]State Key Laboratory of Precision Spectroscopy,School of Physics and Electronic Science,East China Normal University,Shanghai 200062,China [2]Huawei Technologies Co,Ltd.,Bantian Longgang District,Shenzhen 518129,China [3]Collaborative Innovation Center of Extreme Optics,Shanxi University,Taiyuan 030006,China

出　　处：《Opto-Electronic Science》2023年第1期11-22,共12页光电科学（英文）

基　　金：We are grateful for financial supports from the Ministry of Science and Technology of China(Grant No.2021YFA1401100);National Natural Science Foundation of China(Grant Nos.12074123,11804227,91950112),and the Foundation of‘Manufacturing beyond limits’of Shanghai.

摘　　要：This paper reports the fabrication of regular large-area laser-induced periodic surface structures(LIPSSs)in indium tin oxide(ITO)films via femtosecond laser direct writing focused by a cylindrical lens.The regular LIPSSs exhibited good properties as nanowires,with a resistivity almost equal to that of the initial ITO film.By changing the laser fluence,the nanowire resistances could be tuned from 15 to 73 kΩ/mm with a consistency of±10%.Furthermore,the average transmittance of the ITO films with regular LIPSSs in the range of 1200-2000 nm was improved from 21%to 60%.The regular LIPSS is promising for transparent electrodes of nano-optoelectronic devices-particularly in the near-infrared band.

关 键 词：transparent nanowires periodic surface nanostructures femtosecond laser direct writing ITO film anisotropic electrical conductivity 

分 类 号：TN249[电子电信—物理电子学]